ISSN:
1432-0630
Keywords:
7.75
;
78.65
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract A sensitive interferometric technique has been applied for studying the thermal displacement of thin film heated by electron or ion beams. The steady state displacement has been measured and we discuss the dependence on material properties and film thickness showing that this method has a potential for in-situ monitoring of thin-film deposition or etching. Transient effects are studied in a thin quartz plate and the propagation velocity of thermal waves is measured.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00324360
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