ISSN:
1618-2650
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
Notes:
Summary Thin film properties are governed by a number of parameters such as: surface and interface chemical composition, microstructure and the distribution of defects, dopants and impurities. For the determination of most of these aspects sophisticated analytical methods are needed. An overview of these analytical methods is given including: -Features and modes of analytical methods; -Main characteristics, advantages and disadvantages of the established methods [e.g. ESCA (Electron Spectroscopy for Chemical Analysis), AES (Auger Electron Spectroscopy), SIMS (Secondary Ion Mass Spectrometry), RBS (Rutherford Backscattering Spectrometry), SEM (Scanning Electron Microscopy), TEM (Transmission Electron Microscopy), illustrated with typical examples]; -Presentation of relatively new methods such as XRM (X-ray Microscopy) and SCAM (Scanning Acoustic Microscopy). Some features of ESCA (chemical information, insulator analysis, non-destructive depth profiling) have been selected for a more detailed presentation, viz. to illustrate the application of ESCA to practical problems. Trends in instrumental development and analytical applications of the techniques are discussed; the need for a multi-technique approach to solve complex analytical problems is emphasized.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00323094
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