ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
This article describes the outline of a time-resolved x-ray measurement system developed at the Photon Factory to study the pulsed laser annealing of silicon crystals. This system consists of a triple-crystal diffractometer, Q-switched Nd:YAG laser, and two fast detector electronics using a plastic scintillation counter, and enables us to examine the time-change behavior of nearly intrinsic rocking curves under laser irradiation with a time resolution of about 50 ns. The difference in the recovery from lattice deformation between 1.06-μm laser annealing and 0.53-μm laser annealing is clarified.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1140764
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