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  • American Institute of Physics (AIP)  (4)
  • American Physical Society (APS)
  • MDPI Publishing
  • Molecular Diversity Preservation International (MDPI)
  • National Academy of Sciences
  • 1985-1989  (4)
  • 1988  (4)
Collection
Publisher
Years
  • 1985-1989  (4)
Year
  • 1
    Electronic Resource
    Electronic Resource
    High-resolution focused ion beam lithography (1988)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 53 (1988), S. 868-870 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The resolution of focused ion beam (FIB) lithography has been studied by proximity effect measurement and fine pattern fabrication. In the proximity effect measurement, a 0.1 μm line pattern, according to the gap between square and line patterns, could be achieved. Moreover, 0.1 μm line and space poly(methylmethacrylate) patterns and 0.1 μm linewidth novolak based negative resist could be fabricated at 1×1013 and 2×1012 ions/cm2 dose by 260 keV Be++ FIB with 0.1 μm beam diameter, respectively.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.100098
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    Paper (German National Licenses)
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  • 2
    Electronic Resource
    Electronic Resource
    Soft magnetic properties of FeRuGaSi alloy films: SOFMAX (1988)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 64 (1988), S. 772-779 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: To advance new soft magnetic materials of an FeGaSi alloy into the commercial world, improvements on various properties were designed by introducing additive elements without sacrificing its high saturation magnetic induction. The detailed studies on the diversified properties, such as saturation magnetic induction, film internal stress, wear resistivity, and so on, were performed. High-frequency permeability of the laminated structure film was also investigated. As a result, the Ru-added FeRuGaSi alloy films, whose typical compositions are Fe72Ru4Ga7Si17 and Fe68Ru8Ga7Si17 (at. %), prove to be excellent soft magnetic materials especially appropriate for the magnetic recording/playback head core use.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.341923
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    Paper (German National Licenses)
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  • 3
    Electronic Resource
    Electronic Resource
    Annealing effects for implanted Y-Ba-Cu-O superconductors (1988)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 64 (1988), S. 936-938 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Annealing effects of Y-Ba-Cu-O superconductor thin films implanted by 200-keV Ne+ have been investigated. Transition temperature (Tc) end points for 0, 1×1014, 1×1015, and 1×1016 ions/cm2 doses are 75, 71, 62, and 16 K, respectively. The film implanted at 1×1017 ions/cm2 dose indicates nonsuperconductors. The c-lattice constant increases were observed for the implanted films. It is confirmed that the superconducting characteristics for film, which is implanted at 1×1016 ions/cm2 dose, are recovered by annealing in O2 atmosphere at 940 °C for 4 h. Moreover, microcrystal growth caused by annealing the implanted film was observed on the surface.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.341897
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  • 4
    Electronic Resource
    Electronic Resource
    High-frequency permeability in double-layered structure of amorphous Co-Ta-Zr films (1988)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 63 (1988), S. 5424-5426 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The high-frequency permeability of amorphous Co-Ta-Zr films was studied and the frequency dependence was described in terms of the eddy-current-loss formula. For the double-layered structure intervened with SiO2 film, the degradation of the permeability became apparent with the decrease of SiO2 thickness.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.340362
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