ALBERT

All Library Books, journals and Electronic Records Telegrafenberg

feed icon rss

Your email was sent successfully. Check your inbox.

An error occurred while sending the email. Please try again.

Proceed reservation?

Export
  • 1
    Electronic Resource
    Electronic Resource
    Stamford, Conn. [u.a.] : Wiley-Blackwell
    Polymer Engineering and Science 17 (1977), S. 377-380 
    ISSN: 0032-3888
    Keywords: Chemistry ; Chemical Engineering
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: It is illustrated experimentally that swelling and deformation of narrow lines (width 〈 1 μm) is an important limitation on the fidelity and transverse resolution of negative electron resists. The thickness response curve developed for negative resists is discussed and the effect of feature size is introduced through the experimental parameter DgR, the rigid gel dose, or the dose required to initiate a free standing line of width 〈 0.2 μm. The transition from line to area exposure is discussed and the effect of substrate backscatter or transverse resolution in gratings is calculated. The observed resolution is 3-5 times the calculated value from swelling and deformation during development.
    Additional Material: 4 Ill.
    Type of Medium: Electronic Resource
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
  • 2
    Electronic Resource
    Electronic Resource
    Stamford, Conn. [u.a.] : Wiley-Blackwell
    Polymer Engineering and Science 17 (1977), S. 21-26 
    ISSN: 0032-3888
    Keywords: Chemistry ; Chemical Engineering
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Powders of ultra-high molecular weight polyethylene from three suppliers were characterized for density, crystallinity, particle size, particle size distribution and particle morphology. The powders had molecular weights in the range 2-5 million. Bulk powder behavior, compressibility, green strength and springback were evaluated and explained in terms of particle characteristics. The green densities of the powders were found to reach a plateau at pressures of about 100 MPa. These plateau density levels were found to depend upon powder, characteristics and to lie between 80 and 90 percent relative density. Green strength is shown to be a unique function of a densification parameter.
    Additional Material: 9 Ill.
    Type of Medium: Electronic Resource
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
Close ⊗
This website uses cookies and the analysis tool Matomo. More information can be found here...