ISSN:
0049-8246
Keywords:
Chemistry
;
Analytical Chemistry and Spectroscopy
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
The zinc concentration in an epitaxial layer of InSb was measured by proton excited X-rays. For the determination of zinc concentration, the X-ray yield was compared to that from known zinc concentrations. As layer thickness, stopping power and X-ray absorption must be taken into account, a general mathematical evaluation was developed. In an appendix, the derived equations are shown to allow a layer thickness determination. The calculated values agree quite well with the experimental results.
Additional Material:
5 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/xrs.1300040210
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