ISSN:
1432-0630
Keywords:
34
;
61.80
;
85.30
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract Models for the description of implantation profiles in multilayer targets are compared. It is found that all analytical models have severe limitations if the different layers possess very different stopping powers. The best description of multilayer targets is obtained by a combination model using density scaling of the range and integration to account for mass conservation.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00616841
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