ISSN:
0392-6737
Keywords:
Optical properties and materials
Source:
Springer Online Journal Archives 1860-2000
Topics:
Physics
Description / Table of Contents:
Riassunto In questo lavoro è illustrata una applicazione della tecnica della spettroscopia angolare nell'infrarosso per caratterizzare film epitassiali di silicio tipo-n cresciuti su substrati N+ o P+. Sono riportati e discussi alcuni risultati concernenti film con concentrazione di portatori liberi nell'intervallo fra 1014 cm−3 e 1017 cm−3 e spessori dell'ordine di 10 μm. Viene effettuato un confronto con risultati ottenuti con altre tecniche (tecnica delle quattro punte, spreading resistance, curveC−V, etc.) e vengono riportate alcune semplici e significative conclusioni.
Abstract:
Резюме В этой статье техника инфракрасной спектроскопии применяется для определения характеристик эпитаксиальных слоев кремнияn-типа, выращенных наN +-илиP +-подложках. Приводятся и сообщаются некоторые результаты, касающиеся пленок, имежщих концентрацию свободных носителей в области от 1014 см−3 до 1017 см−3 и толщину порядка 10 мкм. Проводится сравнение с результатами, полученными с помощью других методов.
Notes:
Summary In this paper the technique of infrared angular spectroscopy applied to the characterization of epitaxial layers ofn-type silicon grown on N+ or P+ substrates is illustrated. Some results are reported and discussed concerning films having a free-carrier concentration ranging from 1014 cm−3 to 1017 cm−3 and thickness of the order of 10 μm. A significant comparison with results obtained by other techniques (four-point probe, spreading resistance,C−V plots, etc.) is performed and a few simple conclusions are drawn.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF02459121
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