ISSN:
1573-4854
Keywords:
macroporous silicon
;
thermal conductivity
;
sensors
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract Results of thermal characterisation based on the phase lag of photoacoustic signal for front-rear surface illumination of porous silicon and nitrided porous silicon membranes for gas sensing devices are presented. Thermal conductivity values in good agreement with literature values have been obtained, confirming the usefulness and reliability of photothermal methods in the investigation of new materials for sensors and microsystems. Preliminary results of stokes-antistokes Raman investigations are also reported.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1023/A:1009630619528
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