ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
To exploit the impressive electronic, mechanical and thermal properties of Carbon Nanotubes(CNTs) in the nanoelectronics technology, the development of deposition methods enabling thesynthesis of well ordered, properly located and reproducible CNTs structures, is stronglyrecommended. We have been developing catalytic CVD synthesis of CNTs in order to get alignednanotubes for applications ranging from nuclear particle-position detectors and cold cathodeemitters for storage devices, to interconnects, vias and CNT-FETs.In this paper, the significant achievements gained on CVD growth processes for the CNTsdeposition are presented. Ni and Fe catalyst nanoparticles have been obtained starting from thinfilms evaporated on silicon based substrates. The growth of vertically aligned carpets of MWNTsand horizontally aligned SWNTs, having a diameter of about 1 nm and bridging between patternedcatalyst islands, has been accomplished. The SEM, TEM, Raman spectroscopy and AFMcharacterizations are discussed
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/14/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.539-543.669.pdf
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