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Single-shot UV-laser ablation of polyimide with variable pulse lengths (1996)

Himmelbauer, M. ; Arenholz, E. ; Bäuerle, D.

Springer

Applied physics 63 (1996), S. 87-90

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ISSN: 1432-0630

Keywords: 42.60 ; 81.60

Source: Springer Online Journal Archives 1860-2000

Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics

Notes: Abstract Single-shot laser ablation of polyimide has been investigated with UV-Ar+-laser radiation (λ = 270-315 nm) for pulse lengths between 140 ns and 5 µs. The irradiated polymer surface was studied with respect to its morphology and ablated depth by means of atomic force microscopy. The dependence of the ablation threshold on laser pulse-length and intensity can be tentatively interpreted on the basis of a thermal process and a (thermal or non-thermal) mechanism which diminishes the activation energy for the desorption of species from the surface.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1007/BF01579750

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