ISSN:
1432-0630
Keywords:
91.60
;
82.40
;
42.60
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract The process of oxide removal in crystalline Ge using a pulsed ultraviolet laser has been studied by means of real-time reflectivity measurements with nanosecond resolution. The interaction of laser radiation with a clean, oxide-free surface has been characterized and the inhomogeneous and homogeneous energy density melting thresholds of c-Ge for 193 nm radiation have been determined. The values are 180 and 370 mJ/cm2, respectively. We have demonstrated that it is possible to remove an oxide overlayer by irradiation in vacuum and to produce a surface that shows the same response to laser radiation as a smooth, oxide-free, chemically cleaned surface. Under certain specific irradiation conditions it is even possible, after removing the oxide overlayer, to produce an enhanced crystalline quality in the near-surface region compared to that obtained upon chemical cleaning as evidenced by Rutherford backscattering/channeling measurements.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01575081
