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Photothermal effect contribution on film quality improvement in excimer-laser induced metal CVD (1985)

Yokoyama, H. ; Uesugi, F. ; Kishida, S. ; [et al.]

Springer

Applied physics 37 (1985), S. 25-30

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ISSN: 1432-0630

Keywords: 81.10 ; 68.55 ; 68.20

Source: Springer Online Journal Archives 1860-2000

Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics

Notes: Abstract KrF excimer laser induced Cr film deposition from Cr(CO)6 has been studied. Remarkable film quality dependence on laser intensity suggested the photothermal effect contribution of intensive uv laser pulses in the CVD process. A cw Ar-ion laser light and its second harmonic light were used, to separate photochemical and photothermal effects. As a result, photoinduced surface heating has been found to be very important for obtaining good quality metallic films in KrF laser induced Cr film CVD.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1007/BF00617865

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