ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Fabrication of 8×18 independently addressable vertical cavity surface emitting laser arrays (VC-SELA) with uniform threshold current, threshold voltage, and high optical output power is reported. The top surface emitting array contains GaAs multiquantum well active regions and exhibits uniform characteristics over a 4×9 mm2 area. The cw threshold current is ≈4.2(minus-plus)0.2 mA, the threshold voltage is 2.65(minus-plus)0.1 V, and the output optical power is greater than 2 mW for the individual elements of the array. To realize these large VC-SELAs, a novel ion implantation mask fabrication was developed.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.109584