ISSN:
0741-0581
Keywords:
Decay measurements
;
Electron-beam-induced current
;
Hydrogenated amorphous silicon
;
Life and Medical Sciences
;
Cell & Developmental Biology
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Natural Sciences in General
Notes:
A simple method for decay measurements of the charge collection mode (commonly referred to as electron-beam-induced current or EBIC) of an electron probe instrument is presented. The decay, which occurs at continuous electron irradiation, should be distinguished from a decay measurement due to the electron beam blanking. This method could be applied to other modes of an electron probe instrument, e.g., cathodoluminescence, in studying electron-beam-sensitive semiconductors. An example of the decay of the EBIC signal in a hydrogenated amorphous silicon device is presented.
Additional Material:
3 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/jemt.1060020513
