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  • Articles  (1,781)
  • Springer  (1,781)
  • Oxford University Press
  • 1980-1984  (1,781)
  • Technology  (1,781)
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  • Articles  (1,781)
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  • 1
    Electronic Resource
    Electronic Resource
    Introductory statement (1981)
    Springer
    Plasma chemistry and plasma processing 1 (1981), S. 1-2 
    Details
    ISSN: 1572-8986
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Technology
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00566371
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  • 2
    Electronic Resource
    Electronic Resource
    Energy-transfer processes in decaying helium-cadmium plasmas (1981)
    Springer
    Plasma chemistry and plasma processing 1 (1981), S. 53-64 
    Details
    ISSN: 1572-8986
    Keywords: Energy transfer ; helium ; cadmium ; gaseous plasma
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Technology
    Notes: Abstract Light absorption and emission spectroscopy were used in studies of the time dependences of the CdII spectral emission and Hem(23S) number density in the stationary afterglow of helium-cadmium mixtures. Transitions from 12 CdII energy levels were monitored in the afterglow. The five CdII states below 20 eV are produced, either directly or via cascading, by the Penning ionization of Cd by Hem(23S). The remaining CdII states studied are produced by the chargeexchange excitation of Cd by He+. No evidence was found for the production of CdII energy levels by charge transfer between Cd and He 2 + or by Penning ionization of Cd by He 2 m (23σ u + ). A value of (5.4±0.3)×10−10 cm3 sec−1 was measured for the reaction rate coefficient for the Penning ionization of Cd by Hem(23S), and a value of (2.1±0.2)×10−10 cm3 sec−1 was measured for the reaction rate coefficient for charge exchange between He+ and Cd at a gas temperature of 200°C.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00566375
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  • 3
    Electronic Resource
    Electronic Resource
    Mechanisms of radical production in CF3Cl, CF3Br, and related plasma etching gases: The role of added oxidants (1981)
    Springer
    Plasma chemistry and plasma processing 1 (1981), S. 37-52 
    Details
    ISSN: 1572-8986
    Keywords: Plasma etching ; formation of etchants ; polymers
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Technology
    Notes: Abstract A model is presented that accounts for the formation of various etchants, unsaturated species, and polymers in halocarbon/oxidant plasma etching mixtures. It is discussed in terms of emission and mass spectral measurements of stable and unstable products in CF3Cl, CF3Br, C2F6, and related systems. In this reaction scheme, fluorocarbon precursors derived from the building block radical CF2 are saturated during reactions with atoms and reactive molecules. The most reactive species are preferentially removed by the saturation reactions. An ordering of this reactivity can be used to predict the dominant atomic etchants as a function of halocarbon and additive gas compositions.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00566374
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  • 4
    Electronic Resource
    Electronic Resource
    Novel techniques for plasma diagnostics: Electron paramagnetic resonance and laser-induced fluorescence spectroscopy (1981)
    Springer
    Plasma chemistry and plasma processing 1 (1981), S. 3-18 
    Details
    ISSN: 1572-8986
    Keywords: “Cold” plasmas ; plasma diagnostics ; concentration of species
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Technology
    Notes: Abstract Diagnostic techniques for low-pressure, “cold” plasmas have mostly been limited to emission and mass spectrometry. Herein, the techniques of gas-phase electron paramagnetic resonance and laser-induced fluorescence spectroscopy are briefly reviewed. Particular attention is paid to their attributes which make them good candidates for plasma diagnostic tools. It is found that gas-phase electron paramagnetic resonance can be used to determine and monitor the absolute concentration of a number of important plasma species, e.g., free radicals and atoms. Laser-induced fluorescence can also monitor, with even more sensitivity, but perhaps not so well absolutely, the concentrations of many plasma species, e.g., free radicals, metastable excited states, and molecular ions.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00566372
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  • 5
    Electronic Resource
    Electronic Resource
    Drift tube investigations on the reactions of O 2 + with CH4 and of CO 2 + with NO in various buffer gases (1981)
    Springer
    Plasma chemistry and plasma processing 1 (1981), S. 65-71 
    Details
    ISSN: 1572-8986
    Keywords: Drift tube ; rate coefficients ; internal excitation
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Technology
    Notes: Abstract The influence of internal excitation on the reactions of O 2 + + CH4 and of CO 2 + + NO has been investigated using a slow flow drift tube. The rate coefficients for these reactions obtained as a function of relative kinetic energy in various buffer gases like He, Ne, Ar, and Kr showed higher values under conditions where the internal excitation of the reactant ions was enhanced. For both reactions the lowest reactivity at all kinetic energies was observed to occur in He, indicating that He is the least effective buffer for collisionally inducing internal excitation of molecular ions.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00566376
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  • 6
    Electronic Resource
    Electronic Resource
    Kinetic and spectroscopic analysis of NH3 decomposition under R.F. Plasma at moderate pressures (1981)
    Springer
    Plasma chemistry and plasma processing 1 (1981), S. 19-35 
    Details
    ISSN: 1572-8986
    Keywords: Decomposition of NH3 ; kinetics ; optical spectroscopy ; gas chromatography
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Technology
    Notes: Abstract The plasma decomposition of NH3 has been studied as a function of the residence time, power input, and pressure. The process follows apparently zero-order kinetics, which can be interpreted on the basis of a kinetic mechanism involving as initial step the rupture of an N-H bond from vibro-rotationally excited modecules. Simultaneous spectroscopic observations of the emission light due to electronically excited NH2, NH, H, and N2 have been used to confirm the suggested mechanism and to show that NH2 and NH are successive intermediate species and that the final step of the decomposition process is the bimolecular recombination NH+NH→N2+H2.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00566373
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  • 7
    Electronic Resource
    Electronic Resource
    Heating and quenching of metastable superconducting compounds with a plasma jet (1981)
    Springer
    Plasma chemistry and plasma processing 1 (1981), S. 73-82 
    Details
    ISSN: 1572-8986
    Keywords: Plasma jet ; heating and quenching ; superconducting compounds
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Technology
    Notes: Abstract Superconducting compounds, such as cubic α-MoC1−x, cubic β-WC1−x, hexagonal MoB2, and cubic δ-TaN, which are metastable at room temperature, have been formed by heating and quenching of their respective equilibrium phases, such as hexagonal η-MoC1−x, hexagonal WC, rhombohedral Mo2B5, and hexagonal ε-TaN in a plasma jet. From calculations based on a simple model, the quenching rate of particles has been estimated to be 105 deg s−1.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00566377
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  • 8
    Electronic Resource
    Electronic Resource
    New design of a radio-frequency plasma torch (1981)
    Springer
    Plasma chemistry and plasma processing 1 (1981), S. 113-129 
    Details
    ISSN: 1572-8986
    Keywords: Radio-frequency plasma ; temperature and flow fields ; injection method
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Technology
    Notes: Abstract A numerical model has been developed for predicting the two-dimensional flow and temperature fields in a radio-frequency (rf) plasma torch. The method employed here is based on Boulos' model with the exception of the boundary conditions for the electric and magnetic field equations. Calculations have been made for the confirmation of a new sample injection method, which is capable of completely evaporating refractory materials at high feeding rates without interfering with the stability of the plasma. In the newly designed torch, the reagent is radially injected into the hottest part of the plasma through quartz capillary tubes set symmetrically between an inductor coil. Experimental investigations have also been performed for verifying the proper function of the design. These results provide evidence that our radial injection method developed here is more effective in practical processing than the conventional axial injection methods.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00566379
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  • 9
    Electronic Resource
    Electronic Resource
    Another jounrnal from Plenum Journal of Pharmacokinetics and Biopharmaceutics vol. 9, no. 1 February 1981 (1981)
    Springer
    Plasma chemistry and plasma processing 1 (1981), S. i 
    Details
    ISSN: 1572-8986
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Technology
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00566382
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  • 10
    Electronic Resource
    Electronic Resource
    Announcements (1981)
    Springer
    Plasma chemistry and plasma processing 1 (1981), S. 133-133 
    Details
    ISSN: 1572-8986
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology , Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Technology
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00566381
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