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Title:
Full-wafer fabrication by nanostencil lithography of micro/nanomechanical mass sensors monolithically integrated with CMOS
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Nanotechnology [0957-4484] Arcamone, J yr:2008
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Arcamone, J
Serra Graells, F
Fraxedas, J
Brugger, J
Pérez Murano, F
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Brugger, J
Pérez Murano, F
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Serra Graells, F
Fraxedas, J
Brugger, J
Pérez Murano, F
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