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Development of transparent and conductive ZnO films by spray pyrolysis

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Abstract

Indium-doped zinc oxide (IZO) films were deposited on Corning 7059 substrates by the spray pyrolysis technique. To achieve higher electrical conductivity both the zinc acetate concentration and indium concentration in the solution were varied. The films were characterized for their structural and electrical properties. Film stability in H2 plasma was also checked for possible use in amorphous and microcrystalline silicon related fields. It was observed that the films can be sustained in a hydrogen plasma, and hence IZO films of high conductivity can be used for the development of amorphous and microcrystalline silicon solar cells.

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Authors and Affiliations

  1. School of Energy Studies, Department of Physics, University of Poona, 411 007, Pune, India

    D. J. Goyal, Chitra Agashe, M. G. Takwale, B. R. Marathe & V. G. Bhide

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  1. D. J. Goyal
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  2. Chitra Agashe
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  3. M. G. Takwale
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  4. B. R. Marathe
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  5. V. G. Bhide
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Goyal, D.J., Agashe, C., Takwale, M.G. et al. Development of transparent and conductive ZnO films by spray pyrolysis. J Mater Sci 27, 4705–4708 (1992). https://doi.org/10.1007/BF01166010

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  • DOI: https://doi.org/10.1007/BF01166010

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