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Title:
MEMS on cavity-SOI wafers
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Solid-State Electronics [0038-1101] Luoto, Hannu yr:2007
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author:
Luoto, Hannu
Henttinen, Kimmo
Suni, Tommi
Dekker, James
Mäkinen, Jari
Torkkeli, Altti
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author:
Luoto, Hannu
Henttinen, Kimmo
Suni, Tommi
Dekker, James
Mäkinen, Jari
Torkkeli, Altti
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initials
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author:
Luoto, Hannu
Henttinen, Kimmo
Suni, Tommi
Dekker, James
Mäkinen, Jari
Torkkeli, Altti
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