ExLibris header image
SFX Logo
Title: High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials
Source:

Sensors [1424-8220] Spannhake, Jan yr:2006


Collapse list of basic services Basic
Full text
Full text available via PubMed Central
GO
Document delivery
Request document via Library/Bibliothek GO
Users interested in this article also expressed an interest in the following:
1. Liu, A Q. "Low-loss lateral micromachined switches for high frequency applications." Journal of Micromechanics and Microengineering 15.1 (2005): 157-67. Link to Full Text for this item Link to SFX for this item
2. Sberveglieri, G. "Silicon hotplates for metal oxide gas sensor elements." Microsystem technologies 3.4 (1997): 183-190. Link to Full Text for this item Link to SFX for this item
3. Barrettino, D. "Hotplate-based monolithic CMOS microsystems for gas detection and material characterization for operating temperatures up to 500c." IEEE Journal of Solid-State Circuits 39.7 (2004): 1202-1207. Link to SFX for this item
4. Jang, Y.-H. H. "High isolation RF MEMS contact switch in V- and W-bands using two directional motions." Electronics letters 46.2 (2010): 153-155. Link to SFX for this item
5. Schmalzl, JÖrg Ö. "The influence of the Prandtl number on the style of vigorous thermal convection." Geophysical and astrophysical fluid dynamics 96.5 (2002): 381-403. Link to SFX for this item
6. Tang, M. "A single-pole double-throw (SPDT) circuit using lateral metal-contact micromachined switches." Sensors and actuators. A, Physical (2005): 187-196. Link to SFX for this item
7. Chan, R. "Low-actuation voltage RF MEMS shunt switch with cold switching lifetime of seven billion cycles." Journal of microelectromechanical systems 12.5 (2003): 713-719. Link to SFX for this item
8. Wunnicke, O. "Small, low-ohmic RF MEMS switches with thin-film package." 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems 2011. 793-796. Link to Full Text for this item Link to SFX for this item
9. Passi, V. "Design guidelines for releasing silicon nanowire arrays by liquid and vapor phase hydrofluoric acid." Microelectronic engineering 103 (2013): 57-65. Link to SFX for this item
10. Hey, E N. "Small globe thermometers." Journal of physics. E, Scientific instruments 1.9 (1968): 955-957. Link to Full Text for this item Link to SFX for this item
11. Borwick, R L. "Variable MEMS capacitors implemented into RF filter systems." IEEE transactions on microwave theory and techniques 51.1 (2003): 315-19. Link to SFX for this item
12. Coutu, R. "Microswitches with sputtered Au, AuPd, Au-on-AuPt, and AuPtCu alloy electric contacts." IEEE transactions on components and packaging technologies 2006. 341-349. Link to Full Text for this item Link to SFX for this item
13. Rijns, JJF F. "CMOS low-distortion high-frequency variable-gain amplifier." IEEE journal of solid-state circuits 31.7 (1996): 1029-. Link to SFX for this item
14. Hyman, D. "Contact physics of gold microcontacts for MEMS switches." IEEE transactions on components and packaging technologies 22.3 (1999): 357-364. Link to SFX for this item
15. Graf, M. "Metal oxide-based monolithic complementary metal oxide semiconductor gas sensor microsystem." Analytical chemistry 76.15 (2004): 4437-4445. Link to Full Text for this item Link to SFX for this item
16. Liu, G. "A switchable MEMs antenna for 38/60 GHz millimeter wave communications." 2004 4th International Conference on Microwave and Millimeter Wave Technology, ICMMT 2004 (2004): 86-89. Link to SFX for this item
17. Lampen, J. "A wafer-capped, high-lifetime ohmic MEMS RF switch." International journal of RF and microwave computer-aided engineering 14.4 (2004): 338-344. Link to Full Text for this item Link to SFX for this item
18. Lee, S. "An RF-MEMS switch with low-actuation voltage and high reliability." Journal of microelectromechanical systems 15.6 (2006): 1605-1611. Link to Full Text for this item Link to SFX for this item
View More...
View Less...
Select All Clear All

Expand list of advanced services Advanced
A service provided by the Library of the Wissenschaftspark Albert Einstein, Potsdam, Germany.
© 2005 SFX by Ex Libris Inc.