Language
English
German
^M
Dutch
Spanish
Title:
Acrylated hyperbranched polymer photoresist for ultra-thick and low-stress high aspect ratio micropatterns
Source:
Journal of Micromechanics and Microengineering [0960-1317] Schmidt, Lars yr:2008
Basic
Full text
Full text available via
EZB-NALIM-00482 IOP Archive NL
Year:
Volume:
Issue:
Start Page:
Document delivery
Request document via
Library/Bibliothek
Users interested in this article also expressed an interest in the following:
description
1.
Loechel, B.
"A new removable resist for high aspect ratio applications."
Microsystem technologies
13.3-4 (2006): 335-338.
description
2.
Kubenz, M.
"Effective baking of thick and ultra-thick photoresist layers by infrared radiation."
Microelectronic Engineering
67-68 (2003): 495-501.
description
3.
Auzelyte, V..
"Exposure parameters for MeV proton beam writing on SU-8."
Microelectronic Engineering
83.10 (2006): 2015-20.
description
4.
Kuebler, Stephen M.
"Design and application of high-sensitivity two-photon initiators for three-dimensional microfabrication."
Journal of photochemistry and photobiology. A, Chemistry
158.2-3 (2003): 163-170.
description
5.
Conradie, E.H. H.
"SU-8 thick photoresist processing as a functional material for MEMS applications."
Journal of Micromechanics and Microengineering
12.4 (2002): 368-374.
Select All
Clear All
Save Citations
Select Format
ProCite
Reference Manager
RefWorks
EndNote
Submit citation export
Advanced
Author
Other articles by this author? -- in
GeoRef
author:
Schmidt, Lars E
Yi, Soyeon
Jin, Young-Hyun
Leterrier, Yves
Cho, Young-Ho
Månson, Jan-Anders E
last name
initials
Other articles by this author? -- in
Online Contents Geosciences
author:
Schmidt, Lars E
Yi, Soyeon
Jin, Young-Hyun
Leterrier, Yves
Cho, Young-Ho
Månson, Jan-Anders E
last name
initials
Other articles by this author? -- using
Web of Science
author:
Schmidt, Lars E
Yi, Soyeon
Jin, Young-Hyun
Leterrier, Yves
Cho, Young-Ho
Månson, Jan-Anders E
last name
initials
Web Search
Find related information in
a Web Search Engine
Excite
Google
HotBot
Ixquick
ZOO
Ask
Yahoo!
Bing
Naver
Search Terms:
Search for related information in
Google Scholar
Article Title
Author Name
Journal Title
Other Search
Search Terms:
A service provided by the
Library of the Wissenschaftspark Albert Einstein
, Potsdam, Germany.
© 2005 SFX by Ex Libris Inc.