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Miniaturization of Compensational Spring System using the Highly Nonlinear Curved beams in MEMS

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Published under licence by IOP Publishing Ltd
, , Citation Bogdan Vysotskyi et al 2017 J. Phys.: Conf. Ser. 922 012012 DOI 10.1088/1742-6596/922/1/012012

1742-6596/922/1/012012

Abstract

In this work an approach to minimize a non-linear system with a flat region in the force-displacement characteristics is studied. Design, simulation, fabrication and characterization of the initial system with the linear compensational spring and that of a miniaturized one without it are presented. The presented highly nonlinear curved beam system shows the same behavior as that with compensational spring system in terms of force-displacement both in the finite element simulation and in the experiment. Thus, an equivalent miniaturized system is proposed with the surface footprint reduced by 2.38 times only by designing means, without changing the technological steps.

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10.1088/1742-6596/922/1/012012