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Title:
Device performance of in situ steam generated gate dielectric nitrided by remote plasma nitridation
Source:
Applied Physics Letters [0003-6951] Al-Shareef, H N yr:2001
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author:
Al-Shareef, H N
Karamcheti, A
Luo, T Y
Bersuker, G
Brown, G A
Murto, R W
Jackson, M D
Huff, H R
Kraus, P
Lopes, D
Olsen, C
Miner, G
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initials
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author:
Al-Shareef, H N
Karamcheti, A
Luo, T Y
Bersuker, G
Brown, G A
Murto, R W
Jackson, M D
Huff, H R
Kraus, P
Lopes, D
Olsen, C
Miner, G
last name
initials
Other articles by this author? -- using
Web of Science
author:
Al-Shareef, H N
Karamcheti, A
Luo, T Y
Bersuker, G
Brown, G A
Murto, R W
Jackson, M D
Huff, H R
Kraus, P
Lopes, D
Olsen, C
Miner, G
last name
initials
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