BAX plays an essential role in retinal ganglion cell (RGC) death induced by optic nerve injury. Recently, we developed M109S, an orally bioactive and cytoprotective small compound (CPSC) that inhibits BAX-mediated cell death. We examined whether M109S can protect RGC from optic nerve crush (ONC)-induced apoptosis. M109S was administered starting 5 h after ONC for 7 days. M109S was orally administered in two groups (5 mg/kg twice a day or 7.5 mg/kg once a day). The retina was stained with anti-BRN3A and cleaved Caspase-3 (active Caspase-3) that are the markers of RGC and apoptotic cells, respectively. ONC decreased the number of BRN3A-positive RGC and increased the number of active Caspase-3-expressing apoptotic cells. In ONC-treated retina, there were cells that were double stained with anti-BRN3A and ant-cleaved Caspase-3, indicating that apoptosis in BRN3A-positive RGCs occurred. M109S inhibited the decrease of BRN3A-positive cells whereas it inhibited the increase of active Caspase-3-positive cells in the retina of ONC-treated mice, suggesting that M109S inhibited apoptosis in RGCs. M109S did not induce detectable histological damage to the lungs or kidneys in mice, suggesting that M109S did not show toxicities in the lung or kidneys when the therapeutic dose was used. The present study suggests that M109S is effective in rescuing damaged RGCs. Since M109S is an orally bioactive small compound, M109S may become the basis for a portable patient-friendly medicine that can be used to prevent blindness by rescuing damaged optic nerve cells from death. Full article

An experiment was conducted to evaluate the effects of increasing the dose of a novel consensus bacterial 6-phytase variant expressed in Trichoderma reesei (PhyG) in broilers fed complex diets highly deficient in minerals, dig AA, and energy. Diets were a nutrient-adequate control (PC); a nutrient-reduced control (NC) formulated with a reduction in available P (avP) by 0.199%, Ca by 0.21%, crude protein by 0.72–1.03%, dig Lys by 0.064–0.084%, Na by 0.047%, and ME by 87.8 kcal/kg, respectively; and NC supplemented with PhyG at 500, 1000, and 2000 FTU/kg feed. BW was decreased and FCR increased in the NC vs. PC, while the PhyG treatments were similar to the PC. Carcass yield and bone ash were also maintained with PhyG supplementation. Phytase provided economic benefit on a feed cost per kg of weight basis for 1 to 35 d; the cost reductions equated to USD 0.006, 0.016, and 0.02/kg BWG at 500, 1000, and 2000 FTU/kg. In conclusion, this trial demonstrated that supplementation with a novel consensus phytase variant in diets highly deficient in minerals, dig AA, and energy maintained growth performance and provided economic benefit, with production benefits being maximized at inclusion levels of 2000 FTU/kg. Full article

Background and Objectives: Non-alcoholic fatty liver disease (NAFLD) is associated with obesity and ranges from simple steatosis to non-alcoholic steatohepatitis (NASH), fibrosis, cirrhosis, and hepatocellular carcinoma. Accumulating evidence in animal models suggests that loss of interleukin-10 (IL-10) anti-inflammatory actions might contribute to lobular inflammation, considered one of the first steps toward NASH development. However, the role of IL-10 in lobular inflammation remains poorly explored in humans. We examined mRNA and protein levels of IL-10 in liver biopsies and serum samples from morbidly obese patients, investigating the relationship between IL-10 and lobular inflammation degree. Materials and Methods: We prospectively enrolled morbidly obese patients of both sexes, assessing the lobular inflammation grade by the Brunt scoring system to categorize participants into mild (n = 7), moderate (n = 19), or severe (n = 13) lobular inflammation groups. We quantified the hepatic mRNA expression of IL-10 by quantitative polymerase chain reaction and protein IL-10 levels in liver and serum samples by Luminex Assay. We estimated statistical differences by one-way analysis of variance (ANOVA) and Tukey’s multiple comparison test. Results: The hepatic expression of IL-10 significantly diminished in patients with severe lobular inflammation compared with the moderate lobular inflammation group (p = 0.01). The hepatic IL-10 protein levels decreased in patients with moderate or severe lobular inflammation compared with the mild lobular inflammation group (p = 0.008 and p = 0.0008, respectively). In circulation, IL-10 also significantly decreased in subjects with moderate or severe lobular inflammation compared with the mild lobular inflammation group (p = 0.005 and p < 0.0001, respectively). Conclusions: In liver biopsies and serum samples of morbidly obese patients, the protein levels of IL-10 progressively decrease as lobular inflammation increases, supporting the hypothesis that lobular inflammation develops because of the loss of the IL-10-mediated anti-inflammatory counterbalance. Full article

Background: Accidents involving the maxillofacial area are sudden and unforeseen, such as traffic accidents and physical altercations. The COVID-19 pandemic was a critical threat to the public in aspects not only involving physical health but also those affecting psychological health due to isolation, leading to a higher incidence of stress and depression among the general population and specifically in patients with OMF trauma. This study assessed the relationship between the impact of the COVID-19 pandemic and the quantity and severity of maxillofacial injuries. Methods: Data were retrieved from the Department of Maxillofacial Surgery of the University Clinical Centre in Gdansk from March 2019 to August 2023. Results: There was an increased risk of injury occurrence to the condylar process of the mandible, especially the left side, Le Fort type II/III fractures, injuries of the maxillary alveolar process, and displacement of the upper facial mass. Simultaneously, a decreased occurrence of certain injuries i.e., Le Fort type III fractures and Le Fort type I/II fractures, was recorded. Conclusions: The COVID-19 pandemic led to an increased occurrence of high-energy injuries, including displacement of the upper facial mass (p = 0.010). Full article

With the widespread use of the 13-valent pneumonia vaccine (PCV13) in China, monitoring adverse events following immunization (AEFIs) is critical. We conducted a descriptive analysis of the AEFI occurrences reported within Hangzhou between the years 2020 and 2023, including the temporal trend of case reports and variables such as sex, age, type of PCV13, dose number, type of reporter, cause-specific classification, severity, and onset from vaccination. Vaccine safety signals were analyzed using reporting odds ratios (RORs). Over the 4 years analyzed in the study, 2564 AEFI cases were reported, including seven severe cases. Most AEFIs occurred within 0–1 days after vaccination (2398, 93.53%), with over half affecting infants aged 1.5–6 months of age. No statistically significant difference was observed between PCV13-TT and PCV-CRM197. Seasonal differences in AEFI reports were noted. Positive signals were detected for fever (ROR-1.96SE: 1.64) and persistent crying (ROR-1.96SE: 1.61). Four serious AEFI cases were coincidental events, while three others were considered vaccine-related cases (including one case each of allergic reaction, febrile seizure, and thrombocytopenia). The safety and tolerability of PCV13 are good, and attention should be paid to severe AEFIs, as well as long-term safety disparities between different types of PCV13. Full article

Background: Despite preventability, 20–50% of patients with acute spinal cord injury/disease (SCI/D) develop hospital-acquired pressure injuries (PIs). The Spinal Cord Injury Implementation and Evaluation Quality Care Consortium (SCI IEQCC) aimed to mitigate PI risk through patient-reported daily skin checks alongside usual care. Methods: This quality improvement initiative utilized an interrupted time series design, encompassing adults ≥ 18 years admitted for inpatient rehabilitation across five Ontario sites from 2020 to 2023. Patient demographics, etiology, and impairment data were obtained from a national registry, while participating sites gathered data on PI onset, location, and severity. Run charts depicted temporal trends, and statistical analyses, including chi-square and logistic regression, compared patients with and without PIs. Results: Data from 1767 discharged SCI/D patients revealed that 26% had ≥1 PI, with 59% being prevalent and 41% incident. Most severe PIs (stages III and IV and unstageable) were acquired prior to admission. Process indicator fidelity was reasonable at 68%. Patients with PIs experienced longer hospital stays, lower Functional Independence Measure (FIM) changes, and FIM efficiency during rehabilitation. Conclusions: PI prevalence is increasing, particularly sacral injuries at admission, while incident cases have decreased since 2021 due to regular skin checks. This trend calls for proactive health system interventions to reduce costs and improve patient outcomes. Full article

Background: Refractive errors, including myopia, hyperopia, and astigmatism, are the leading causes of visual impairment in school-aged children and can significantly impact their academic performance and quality of life. This study aimed to assess the prevalence of refractive errors among school children from economically disadvantaged areas in Northwest México, using a consistent methodology to facilitate comparison with global data. Methods: We adopted the Refractive Error Study in Children (RESC) protocol by the World Health Organization to examine the prevalence of myopia, hyperopia, and astigmatism. The study comprised a systematic sampling of children aged 6 to 18 years from diverse schools in Northwest México. Trained optometrists conducted visual acuity testing and autorefraction, while ophthalmologists performed cycloplegic refraction to ensure accuracy. Results: The study found a myopia (SE ≤−1.50 D at least one eye) prevalence of 14.55% (95% CI: 13.27–15.91), with a higher incidence in females (6.92%) compared to males (6.00%) in at least one eye. Hyperopia (SE ≥ +1.00 D at least one eye) was less common, at 3.23% (95% CI: 2.61–3.95), with a slightly higher occurrence in males in at least one eye. Astigmatism (Cylinder ≥ 0.75 D at least one eye) was present in 18.63% (95% CI: 17.21–20.12) of the students in at least one eye, with no significant difference between genders. These findings are consistent with other studies in regions such as Puerto Rico and Iran, indicating widespread refractive error issues among schoolchildren. Conclusions: The high prevalence of refractive errors, particularly myopia and astigmatism, highlights the critical need for regular vision screenings in schools and the implementation of public health interventions to provide corrective eyewear. Our study confirms the importance of utilizing standardized methodologies like the RESC protocol to compare refractive error prevalence across different geographical and socio-economic contexts, thereby informing global public health strategies. Full article

The aim of this study was to examine the association between nutrition-related knowledge (NRK) and nutrition-related practice (NRP) among 1440 Polish students (aged 10–18 years) and identify the determining factors. Questions about NRK and NRP were thematically similar and referred to the recommendations of the Polish Pyramid of Healthy Nutrition and Lifestyle for Children and Adolescents (4–18 years). A cross-sectional study was conducted using the CAWI method. The respondents obtained an average of 51% of points in the NRK examination and 32% of points in the NRP examination. It was shown that NRP was positively associated with NRK (p < 0.001). The students’ NRK was positively determined by the following factors: being female (p < 0.001), older age of students (p < 0.001), living in a larger town (p = 0.012) and a higher level of education of the mother/legal guardian (p < 0.001). NRP was positively associated with greater physical activity of the students (p < 0.001). NRK and NRP were negatively associated with the subjects’ BMI (p = 0.029; p = 0.040, respectively). The analysis of NRK shows that the students’ knowledge regarding the consumption of milk, milk products and fish should be increased (17–20% correct answers). The analysis of NRP reveals that only 4–14% of students declared appropriate eating habits regarding the consumption of sweet and salty snacks, fish, wholegrain products and milk. This study highlights the need for targeted educational strategies to increase both the understanding and application of dietary guidelines among Polish adolescents for the prevention of diet-related diseases. Full article

Recently, superconductivity with T_c ≈ 80 K was discovered in La₃Ni₂O₇ under extreme hydrostatic pressure (>14 GPa). For practical applications, we needed to stabilize this state at ambient pressure. It was proposed that this could be accomplished by substituting La with Ba. To put this hypothesis to the test, we used the state-of-the-art atomic-layer-by-layer molecular beam epitaxy (ALL-MBE) technique to synthesize (La_1−xBa_x)₃Ni₂O₇ films, varying x and the distribution of La (lanthanum) and Ba (barium). Regrettably, none of the compositions we explored could be stabilized epitaxially; the targeted compounds decomposed immediately into a mixture of other phases. So, this path to high-temperature superconductivity in nickelates at ambient pressure does not seem promising. Full article

Background: Chest pain is a prevalent reason for emergency room referrals and presents diagnostic challenges. The physician must carefully differentiate between cardiac and noncardiac causes, including various vascular and extracardiovascular conditions. However, it is crucial not to overlook serious conditions such as acute coronary syndrome (ACS). Diagnosis of acute myocardial infarction (AMI) and early discharge management become difficult when traditional clinical criteria, ECG, and troponin values are insufficient. Recently, the focus has shifted to a “multi-marker” approach to improve diagnostic accuracy and prognosis in patients with chest pain. Methods: This observational, prospective, single-center study involved, with informed consent, 360 patients presenting to the emergency department with typical chest pain and included a control group of 120 healthy subjects. In addition to routine examinations, including tests for hsTnI (Siemens TNIH kit), according to the 0–1 h algorithm, biochemical markers sST2 (tumorigenicity suppression-2) and suPAR (soluble urokinase plasminogen activator receptor) were also evaluated for each patient. A 12-month follow-up was conducted to monitor outcomes and adverse events. Results: We identified two groups of patients: a positive one (112 patients) with high levels of hsTnI, sST2 > 24.19 ng/mL, and suPAR > 2.9 ng/mL, diagnosed with ACS; and a negative one (136 patients) with low levels of hsTnI, suPAR < 2.9 ng/mL, and sST2 < 24.19 ng/mL. During the 12-month follow-up, no adverse events were observed in the negative group. In the intermediate group, patients with hsTnI between 6 ng/L and the ischemic limit, sST2 > 29.1 ng/mL and suPAR > 2.9 ng/mL, showed the highest probability of adverse events during follow-up, while those with sST2 < 24.19 ng/mL and suPAR < 2.9 ng/mL had a better outcome with no adverse events at 12 months. Conclusion: Our data suggest that sST2 and suPAR, together with hsTnI, may be useful in the prognosis of cardiovascular patients with ACS, providing additional information on endothelial damage. These biomarkers could guide the clinical decision on further diagnostic investigations. In addition, suPAR and sST2 emerge as promising for event prediction in patients with chest pain. Their integration into the standard approach in PS could facilitate more efficient patient management, allowing safe release or timely admission based on individual risk. Full article

Transformer has recently become widely adopted in point cloud registration. Nevertheless, Transformer is unsuitable for handling dense point clouds due to resource constraints and the sheer volume of data. We propose a method for directly regressing the rigid relative transformation of dense point cloud pairs. Specifically, we divide the dense point clouds into blocks according to the down-sampled superpoints. During training, we randomly select point cloud blocks with varying overlap ratios, and during testing, we introduce the overlap-aware Rotation-Invariant Geometric Transformer Cross-Encoder (RIG-Transformer), which predicts superpoints situated within the common area of the point cloud pairs. The dense points corresponding to the superpoints are inputted into the Transformer Cross-Encoder to estimate their correspondences. Through the fusion of our RIG-Transformer and Transformer Cross-Encoder, we propose Transformer-to-Transformer Regression (TTReg), which leverages dense point clouds from overlapping regions for both training and testing phases, calculating the relative transformation of the dense points by using the predicted correspondences without random sample consensus (RANSAC). We have evaluated our method on challenging benchmark datasets, including 3DMatch, 3DLoMatch, ModelNet, and ModelLoNet, demonstrating up to a $7.2\%$ improvement in registration recall. The improvements are attributed to our RIG-Transformer module and regression mechanism, which makes the features of superpoints more discriminative. Full article

This article provides panel data estimations of the tax revenue determinants in VG (Visegrad Group) countries (the Czech Republic, Hungary, Poland, and Slovakia) for the period 1994–2023. The aim of this research was to determine how the macroeconomic determinants affect the tax revenues in the selected countries. Within the static models, the Hausman test showed that the FE (fixed effects) model is appropriate and reflects the significant effects of the gross domestic product, population, inflation, unemployment, import, government revenue, government expenditure, and EU enlargement on the tax revenue. The PMG (Pooled Mean Group) model is an adequate model among the dynamic models and manifests the significant effect of the lagged value of the tax revenue. In the short term, growth of the gross domestic product and population by 1% causes higher changes in the tax revenue of 0.14% and 2.93%. Likewise, growth of the inflation rate by 1% decreases the tax revenue by 0.037%, which is higher than in the long term. Further, the results show that EU enlargement is significant for tax revenue in the short term, as well as in the long term. In the long term, unemployment has a greater significant effect on tax revenue, where 1% growth decreases the tax revenue by 0.15%. In contrast, government revenue is significant for tax revenue only in the long term, where 1% growth increases the tax revenue by 0.77%. Full article

The curing of epoxy resin is a complex thermo-chemical process that is difficult to monitor using existing sensing systems. We monitored the curing process of an epoxy resin by using long-period fiber gratings. The refractive index of the epoxy resin increases during the curing process and can be measured to determine the degree of curing. We employed long-period fiber gratings that are sensitive to the refractive index of an external medium for the measurement of refractive index changes in the resin. We observed that the resonances of long-period fiber gratings increased their depth with the increased refractive index of the resin, which was well described by our simulation taking the coupling to radiation modes into account. We demonstrated that the degree of cure can be estimated from the depth of the grating resonances using a phenomenological model. At the same time, long-period fiber gratings are sensitive to temperature variations and internal strains that are induced during curing. These factors may affect the measurements of curing degree and should also be addressed. Full article

Background: Early-onset colorectal cancer (EO-CRC) is defined as colorectal cancer diagnosed before the age of 50 years, and its incidence has been increasing over the last decade, now accounting for 10% of all new CRC diagnoses. Average-onset colorectal cancer (AO-CRC) has shown a steady decline in its incidence and related mortality over the past 20 years. The disparities in outcomes and overall survival (OS) between EO-CRC and AO-CRC are controversial. Our study compared OS and cause-specific survival (CSS) between metastatic EO-CRC (mEO-CRC) and metastatic AO-CRC (mAO-CRC) and identified the associated factors. Methods: Data on patient characteristics, tumor characteristics, incidence, and mortality were obtained from the SEER database from 2010 to 2020. We identified 23,278 individuals aged > 18 years with a confirmed diagnosis of all histological subtypes of metastatic CRC (M1 on TNM stage) using ICD-O-3 site codes. mEO-CRC and mAO-CRC were compared. OS distributions and CCS were analyzed using the Kaplan–Meier method and log-rank test to assess differences. A Cox regression model was used to assess the associations between variables. Results: mEO-CRC constituted 17.79% of the cases, whereas 82.21% had mAO-CRC. Most patients with mEO-CRC were 45–49 years old (47.66%), male (52.16%) and White (72.57%) and had adenocarcinoma histology (87.30%). Left colon tumors were most prevalent in both groups (40.26%) but were more prevalent in mEO-CRC patients than in mAO-CRC patients (49.63% vs. 38.23%, p < 0.001). Patients with mEO-CRC had higher OS (p < 0.001) and CSS (p < 0.001) than those with mAO-CRC. Patients with mEO-CRC also had significantly better median overall survival (30 months vs. 18 months, p < 0.001). The factors associated with worse OS included mAO-CRC (p < 0.001), mucinous adenocarcinoma (p < 0.001), male sex (p = 0.003), and a lack of surgical intervention (p < 0.001). Conclusions: Most patients with mEO-CRC fall within the range of 45 to 49 years of age. Patients with mEO-CRC were more likely to receive cancer-directed therapy (including chemotherapy and radiotherapy) and had better OS and CSS than those with mAO-CRC. This is likely attributable to the better performance status, fewer comorbidities, and better tolerance to cancer-directed therapy in mEO-CRC patients. The factors associated with worse OS and CSS were age > 50 years, mucinous adenocarcinoma, male sex, and no surgical treatment. Full article

Due to their intrinsic properties, the current applicability of ionic liquids is enormous. In particular, their use in electrochemistry is beyond question. Numerous studies on these compounds and their mixtures, especially with lithium salts, focus on their use as electrolytes for batteries and other energy storage devices. This includes thermal energy storage devices, where 4th generation ionic liquids and their derivatives show a huge potential. Nevertheless, considering the uneven availability of the raw materials, such as lithium, research has extended to mixtures of these compounds with other salts of different metals that are more abundant and widely distributed, such as magnesium or aluminum. This work presents a comprehensive thermal characterization, using differential scanning calorimetry and thermogravimetry, of the protic ionic liquid ethylimidazolium nitrate and its mixture with magnesium and aluminum nitrate salts at different concentrations. Additionally, a comparison between these results and previous studies of mixtures of this ionic liquid with lithium nitrate, as well as mixtures of the protic ionic liquid EAN with the same metal salts, was also performed. The results indicated that the salt addition tends to broaden and reduce crystallization and melting peaks, while the glass transition becomes more visible and shifts to higher temperatures with increasing salt concentration. This is due to the disorder generated by the rearrangement of ions in the polar domains, which erodes the hydrogen bond network of the protic ionic liquid. Nevertheless, the thermal stability of the blended samples does not change significantly compared to the bulk ionic liquid. Full article

The discovery of the new ammonite Altudostephanus longicostis gen. et sp. nov. around the lower/upper Valanginian boundary (Lower Cretaceous) with a true longitudinal ribs pattern oriented in the direction of coiling is reported here for the first time for the Cretaceous. This character rises questions as this type of ornamentation is mainly represented in the Paleozoic or old Mesozoic taxa. Its study shows that it is not a ‘shell accident’ and that it belongs to a particular lineage of Olcostephaninae, in a restricted geographical area and in a progenetic evolutionary context derived from Olcostephanus, which justifies the introduction of the new monophyletic genus Altudostephanus gen. nov. The discovery of a specimen of Passendorferia sp. (Oxfordian, Upper Jurassic) with the same pattern allows us to consider that this capacity could have a genetic cause. It seems that the fixation of this character, otherwise strongly recessive, in A. longicostis gen. et sp. nov. could take place thanks to a founder effect and the drastic numerical reduction in the population. The geological reference section PIG5 (Moriez area, South-Eastern France) is described, and the problem of the conservation of ‘pyritic’ s.l. ammonites is addressed with a proposed methodology allowing their long-term conservation. Full article

This study tackles the challenge of optimizing scrap blends in steel production to achieve sustainability and environmental consciousness. Focusing on a steel-casting company as a case study, we develop a mathematical model that minimizes cost, emissions, and energy consumption while maximizing scrap utilization. This model considers the specific elemental composition of various scrap piles and pure elements, alongside their associated costs and environmental impacts in the production of GS52 steel in a foundry company. Through the GAMS program and further verification with Microsoft Excel, we demonstrate that the optimal blend significantly reduces raw material costs by prioritizing scrap (99.7%) over pure elements. Moreover, this optimized blend minimizes energy consumption and associated carbon emissions, thus contributing to a more sustainable and environmentally friendly steel production process. This study offers valuable insights and a practical framework for the steel industry to adopt cost-effective and eco-conscious practices, aligning with global efforts towards sustainable manufacturing. Full article

Twin-screw granulation has emerged as a key process in powder processing industries and in the pharmaceutical sector to produce granules with controlled properties. This comprehensive review provides an overview of the simulation techniques and approaches that have been employed in the study of twin-screw granulation processes. This review discusses the major aspects of the twin-screw granulation process which include the fundamental principles of twin-screw granulation, equipment design, process parameters, and simulation methodologies. It highlights the importance of operating conditions and formulation designs in powder flow dynamics, mixing behaviour, and particle interactions within the twin-screw granulator for enhancing product quality and process efficiency. Simulation techniques such as the population balance model (PBM), computational fluid dynamics (CFD), the discrete element method (DEM), process modelling software (PMS), and other coupled techniques are critically discussed with a focus on simulating twin-screw granulation processes. This paper examines the challenges and limitations associated with each simulation approach and provides insights into future research directions. Overall, this article serves as a valuable resource for researchers who intend to develop their understanding of twin-screw granulation and provides insights into the various techniques and approaches available for simulating the twin-screw granulation process. Full article

We argue that an epistemology of martial arts is at least as complex as advanced epistemological positions available to the philosophy of science. Part of the complexity is a product of the epistemic relation between the knower and known, or the scientist and the object of inquiry. In science, we measure things without changing them and, sometimes, complex systems can change as we measure them; but, in the epistemology of sport that we are interested in, each measurer is also an object of inquiry. As such, each martial arts practitioner has to use various epistemic tools to measure a responsive system. We proceed in three steps. First, we discuss three epistemological frameworks in the philosophy of science—perspectivism, productivism, and distributed cognition. Second, we develop an epistemology of martial arts that features components from each of those epistemic frameworks. Third, we close the paper with a brief discussion about the unique complexity available to the martial artist, focusing on the responsive measurements that occur between two systems. Full article

In this paper, we demonstrate a comprehensive study of NF₃-based selective etching processes for inner spacer formation and for channel release, enabling stacked horizontal gate-all-around Si nanosheet transistor architectures. A cyclic etching process consisting of an oxidation treatment step and an etching step is proposed and used for SiGe selective etching. The cyclic etching process exhibits a slower etching rate and higher etching selectivity compared to the direct etching process. The cycle etching process consisting of Recipe 1, which has a SiGe etching rate of 0.98 nm/cycle, is used for the cavity etch. The process achieved good interlayer uniformity of cavity depth (cavity depth ≤ 5 ± 0.3 nm), while also obtaining a near-ideal rectangular SiGe etch front shape (inner spacer shape = 0.84) and little Si loss (0.44 nm@ each side). The cycle etching process consisting of Recipe 4 with extremely high etching selectivity is used for channel release. The process realizes the channel release of nanosheets with a multi-width from 30 nm to 80 nm with little Si loss. In addition, a selective isotropic etching process using NF₃/O₂/Ar gas mixture is used to etch back the SiN film. The impact of the O₂/NF₃ ratio on the etching selectivity of SiN to Si and the surface roughness of SiN after etching is investigated. With the introduction of O₂ into NF₃/Ar discharge, the selectivity increases sharply, but when the ratio of O₂/NF₃ is up to 1.0, the selectivity tends to a constant value and the surface roughness of SiN increases rapidly. The optimal parameter is O₂/NF₃ = 0.5, resulting in a selectivity of 5.4 and a roughness of 0.19 nm. Full article