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Title:
Enhanced oxidation of TiAlN barriers integrated in three-dimensional ferroelectric capacitor structures
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Journal of Applied Physics [0021-8979] Lisoni, J G yr:2007
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Author
Other articles by this author? -- in
GeoRef
author:
Lisoni, J G
Johnson, J A
Goux, L
Paraschiv, V
Maes, D
Van der Meeren, H
Willegems, M
Haspeslagh, L
Wouters, D J
Caputa, C
Zambrano, R
Turquat, Ch
Muller, Ch
last name
initials
Other articles by this author? -- in
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author:
Lisoni, J G
Johnson, J A
Goux, L
Paraschiv, V
Maes, D
Van der Meeren, H
Willegems, M
Haspeslagh, L
Wouters, D J
Caputa, C
Zambrano, R
Turquat, Ch
Muller, Ch
last name
initials
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Web of Science
author:
Lisoni, J G
Johnson, J A
Goux, L
Paraschiv, V
Maes, D
Van der Meeren, H
Willegems, M
Haspeslagh, L
Wouters, D J
Caputa, C
Zambrano, R
Turquat, Ch
Muller, Ch
last name
initials
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