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Title:
Thermal desorption spectra of SiO2 films deposited on Si and on thermal SiO2 by tetraethylorthosilicate/O3 atmospheric-pressure chemical vapor deposition
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Journal of Applied Physics [0021-8979] Cheng, Degang yr:1999
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Author
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author:
Cheng, Degang
Tsukamoto, Koji
Komiyama, Hiroshi
Nishimoto, Yuko
Tokumasu, Noboru
Maeda, Kazuo
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author:
Cheng, Degang
Tsukamoto, Koji
Komiyama, Hiroshi
Nishimoto, Yuko
Tokumasu, Noboru
Maeda, Kazuo
last name
initials
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author:
Cheng, Degang
Tsukamoto, Koji
Komiyama, Hiroshi
Nishimoto, Yuko
Tokumasu, Noboru
Maeda, Kazuo
last name
initials
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