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Micro- and integrated optical devices in glasses and polymers for hybride integration into microsystems

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Abstract

Micro- and integrated-optical devices in glass and polymers are integrated increasingly in microsystems. Design and simulation of such optical elements are well developed. Ray tracing and a manifold of propagation and field calculation methods are available. First steps to CAD have been done.

Using Ag+−Na+ ion exchange in special optical glasses, one-and two-dimensional refractive index profiles of definite shape have been realezed. Good quality one-dimensional profiles can be used for micro-cylindrical lens fabrication (N.A.≥0.5), two dimensional index gradients have been used for phase grating fabrication. E-beam direct writing with variable shaped beam has been used successfully to realize different types of surface corrugated microoptical components. Embossing in polymers is a well suitable method for fabrication of passive integrated-optical devices and of micro-optical elements as refractive and diffractive lenses and lens arrays, corrugated prisms and gratings. Applications of glass and polymer microoptical devices have been demonstrated for laser diode collimation, in miniaturized interferometers, beam deflectors and modulators.

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Literature

  1. Yevick, D.;Glasner, M.: Analysis of Forward-Wide Angle Light Propagation in Semiconductor Rib Waveguides and Integrated Optic Structures. El. Lett. 25 (1989) 1611–1612

    Google Scholar 

  2. Hermansson, B.;Yevick, D.: Generalized Propagation Technique-Application to Semiconductor Rib Waveguide Y-Junctions. IEEE Phot. Tech. Lett. 2 (1990) 738–740

    Google Scholar 

  3. Glaser, M. et al.: Sixth-Order Generalized Propagation Techniques. El. Lett. 27 (1991) 475–477

    Google Scholar 

  4. Hadley, G. R.: A Multi-Step Methods for Wide Angle Beam Propagation. Opt. Lett 17 (1992) 1426

    Google Scholar 

  5. Brenner, K.H.;Singer, W.: Light Propagation through Microlenses: a New Simulation Method. Appl. Optics 32 (1993) 4984–4988

    Google Scholar 

  6. Working Group I Cost 216. Comparison of different modeling techniques for longitudinally invariant integrated optical waveguides. IEEE Proc. 136, 1989

  7. Nolting, H.P. et al.: Results of the Teupitz BPM Bench Mark Test, Spec. contr. paper on Int. Symp. Integr. Optics (Linear and Nonlinear Integrated Optics) Lindau 11.-14.04.1994. Proc. SPIE 2212

  8. Oikawa, M. et al.: Miniature and Micro-Optics: Fabrication and System Applications. Proc. SPIE 1544 (1991) 226–236

    Google Scholar 

  9. Poßner, T.;Schreiter, G.;Müller, R.: Special Glass for Integrated and Microoptics. Glastech. Ber. 64 (1991) 185

    Google Scholar 

  10. Poßner, T.; Döpel, E.; Göring, R.: Cylindrical Microlenses and Transmission Phase Gratings by Silver Ion Exchange in Optical Glasses for Microoptic Applications. Techn. Digest MOC/GRIN'93, Kawasaki, 282–285

  11. Göring, R. Rothhardt, M.: Application of the Refracted New Field Technique to Multimode Planar and Channel Waveguides in Glass. J. Opt. Commun, 7 (1986) 82

    Google Scholar 

  12. Fujita, T. et al.: Blazed Gratings and Fresnel Lenses Fabricated by Electron-Beam Lithography. Opt. Lett. 7 (1982) 578

    Google Scholar 

  13. Hosokawa, H. et al.: Simultaneous Fabrication of Grating Couplers and an Optical Waveguide by Photopolymerisation Integrated Photonics Research, Hilton Head 1990, paper MF6, Proc. 26–27

  14. Kley, E.B.; Poßner, T.; Göring, R.: Realization of Microoptic and Integrated Optic Components by Electron-Beam-Lithographic Surface Profiling and Ion Exchange in Glass. Internat. J. of Optoelectronics (in press)

  15. Neyer, A. et al.: New Fabrcation Technology for Polymer Optical Waveguides. IPR 92, New Orleans (1992), paper WB 2-1

  16. Dannberg, P. et al.: Fabrication of Monomode Polymer Waveguides by Replication Technique in: Proc. ECOC'93, Montreux, 437–440

  17. Neyer, A. et al.: Design and Fabrication of Low Loss Passive Polymeric Wave guides Based on Mass Replication Techniques. ECIO 93, Neuchâtel 18–22.4.1993, Proc. 9-10/9-11

  18. Großkopf, K. et al.: Performance of Integrated Optical Singlemode Multiport Splitters in Glass under Environmental Test Conditions. ECIO'93, Neuchâtel 18.–22.04.1993, Proc. 9-6/9-7

  19. Göring, R., et al.: Miniaturized Optical Systems for Beam Deflection and Modulation. Proc. SPIE 1992 (1993) 54–61

    Google Scholar 

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Authors and Affiliations

  1. Fraunhofer-Einrichtung-IOF, Schillerstraße 1, D-07745, Jena, Germany

    W. Karthe

Authors
  1. W. Karthe
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  2. R. Göring
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  3. A. Bräuer
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  4. E. B. Kley
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  5. Ch. Wächter
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  6. P. Dannberg
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  7. T. Poßner
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Karthe, W., Göring, R., Bräuer, A. et al. Micro- and integrated optical devices in glasses and polymers for hybride integration into microsystems. Microsystem Technologies 1, 59–67 (1995). https://doi.org/10.1007/BF01624464

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  • DOI: https://doi.org/10.1007/BF01624464

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