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Growth of molybdenum carbide particles from an amorphous phase induced by ion bombardment

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Abstract

Transmission electron microscopy and Auger electron spectroscopy revealed that the Ar+-ion bombardment of a carbon-containing molybdenum film with an amorphous structure led to the growth of carbide particles smaller than ∼30nm in diameter. The particles possessed an fcc structure and were distributed like islands in the film. Electron diffraction analysis identified them withβ-MoC0.75, a high-temperature phase of MoC0.75. Presumably, the heating effect of the ion beam was responsible for forming and stabilizing the particles.

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Authors and Affiliations

  1. Department of Fine Measurements, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, 466, Nagoya, Japan

    F. Okuyama, Y. Fujimoto, S. Kato & T. Kondo

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  1. F. Okuyama
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  2. Y. Fujimoto
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  3. S. Kato
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  4. T. Kondo
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Okuyama, F., Fujimoto, Y., Kato, S. et al. Growth of molybdenum carbide particles from an amorphous phase induced by ion bombardment. Appl. Phys. A 38, 275–279 (1985). https://doi.org/10.1007/BF00616063

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  • DOI: https://doi.org/10.1007/BF00616063

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