Publication Date:
2021-10-29
Description:
Electronic skin (E-skin) has attracted much attention in smart wearables, prosthetics, and robotics. The capacitive-type pressure sensor is generally regarded as one good option to design tactile sensing devices owing to its superior sensitivity in low-pressure region, fast response time and convenient manufacturing. Introducing microstructures on electrode surface is an effective approach to achieve highly sensitive capacitive pressure sensors. In this work, an electromechanical model is proposed to build the relationship between capacitance change and compressive force. The present model can predict the sensitivity of capacitive pressure sensor with microstructured electrodes, where each cellular microstructure is modeled using the contact mechanics theory. It is the first time in the literature that based on Hertz theory framework, one rigorous electromechanical theory framework is established to model flexible capacitive pressure sensor, and the model can be extended to other microstructures, such as micro-pyramid, micro-pillar, and micro-dome array. The validation indicates that the analytical results well agree with the experimental data from our previous work and other literatures. Moreover, the present model can well capture the sensitivity of pressure sensor on the beginning range of small pressure. The sensitivity on this range is the most significant for the E-skin due to its robust linearity for one pressure sensor. Besides, we analyzed the compressive force-displacement relationship, the compressive force-contact radius relationship and the influences of the geometrical and material parameters on the electromechanical coupling effect. The results show that the height and the Young’s modulus of the soft dielectric layer are regarded as the dominant influencing factors in the sensitivity of capacitive pressure sensors.
Print ISSN:
0022-3727
Electronic ISSN:
1361-6463
Topics:
Physics
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