ISSN:
0021-8995
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Polyimidothioethers were synthesized as possible polymers for evaluation as X-ray resists. These polymers were varied in the ratio of the monomers and in their structures. Aliphatic thiols, bismaleimides, and iodonium monomers were used. The composition was varied using ratios of the bisimide to iodonium of 9: 1, 8 : 2, 7 : 3, 6 : 4, 5 : 5, and 0 : 1. The ratio of the thiols, containing 6 to 10 —CH2— groups, to the monomers was 1 : 1. The synthesis and characterization of the intermediate compounds and polymers are described in detail.
Additional Material:
7 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/app.1992.070450414
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