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  • 1
    Electronic Resource
    Electronic Resource
    SURFACE CHEMISTRY AND TRIBOLOGY OF MEMS (2004)
    Palo Alto, Calif. : Annual Reviews
    Annual Review of Physical Chemistry 55 (2004), S. 35-54 
    Details
    ISSN: 0066-426X
    Source: Annual Reviews Electronic Back Volume Collection 1932-2001ff
    Topics: Chemistry and Pharmacology , Physics
    Notes: The microscopic length scale and high surface-to-volume ratio, characteristic of microelectro-mechanical systems (MEMS), dictate that surface properties are of paramount importance. This review deals with the effects of surface chemical treatments on tribological properties (adhesion, friction, and wear) of MEMS devices. After a brief review of materials and processes that are utilized in MEMS technology, the relevant tribological and chemical issues are discussed. Various MEMS microinstruments are discussed, which are commonly employed to perform adhesion, friction, and wear measurements. The effects of different surface treatments on the reported tribological properties are discussed.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1146/annurev.physchem.55.091602.094445
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    Paper (German National Licenses)
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    SURFACE CHEMISTRY AND TRIBOLOGY OF MEMS (2004)
    Annual Reviews
    Details
    Publication Date: 2004-06-01
    Description: ▪ Abstract  The microscopic length scale and high surface-to-volume ratio, characteristic of microelectro-mechanical systems (MEMS), dictate that surface properties are of paramount importance. This review deals with the effects of surface chemical treatments on tribological properties (adhesion, friction, and wear) of MEMS devices. After a brief review of materials and processes that are utilized in MEMS technology, the relevant tribological and chemical issues are discussed. Various MEMS microinstruments are discussed, which are commonly employed to perform adhesion, friction, and wear measurements. The effects of different surface treatments on the reported tribological properties are discussed.
    Print ISSN: 0066-426X
    Electronic ISSN: 1545-1593
    Topics: Chemistry and Pharmacology , Physics
    Published by Annual Reviews
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