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  • American Institute of Physics (AIP)  (10)
  • American Association for the Advancement of Science  (1)
  • 1
    Digitale Medien
    Digitale Medien
    Ion beam diagnostics by Doppler shifted light emissionsa) (1992)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 63 (1992), S. 3063-3067 
    Details
    ISSN: 1089-7623
    Quelle: AIP Digital Archive
    Thema: Physik , Elektrotechnik, Elektronik, Nachrichtentechnik
    Notizen: Broad ion beams in the energy range of 0.2 to 1.5 keV originating from a filament source with argon as feed gas have been analyzed by high-resolution emission spectroscopy. The Doppler structure of Ar+ emissions reveals the existence of different velocity classes. Besides slow ions and ions possessing the main beam energy, electronically excited Ar+ ions with twice the main beam energy are detected which are attributed to a single-electron capture process in Ar++/Ar collisions. As a preliminary result from a reactive beam extracted from a microwave CF4 source plasma fast F atoms are detected which are attributed to charge exchange and dissociative collisions in the process chamber.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1142607
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  • 2
    Digitale Medien
    Digitale Medien
    Gold elliptical nanoantennas as probes for near field optical microscopy (2002)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 92 (2002), S. 1078-1083 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: We investigate the light scattering by individual nanometer-sized gold particles attached at the apex of fiber-based probes for near field optical microscopy. The dependence of the light scattering by the gold nanoparticle on the wavelength, the shape, and the surrounding medium dielectric profile are theoretically described and experimentally investigated, demonstrating that the tuning of the particle's size and shape plays a crucial role in the light scattering process. In the case of gold spherical nanostructures, the plasmon resonance occurs at 540 nm in air, and 600 nm in water. A higher surrounding medium refraction index leads to a redshift of the plasmon resonance in the gold particle. Moreover, for elliptical structures, the orientation of the polarization of the incident field, as well as the relative ratio of the ellipse dimensions along its main axis, govern the position of the plasmon resonances. The light transmission spectrum for several probes where a single elliptical gold particle has been grafted exhibits at least one resonance in the range 600–650 nm. Surface plasmon resonances are of importance for the field enhancement at the end of the modified tip, thus leading to improvement of the achievable resolution for near field optical microscopy. An optimized design of the metallic nanostructure deposited at the apex of the near field probe is needed to maximize the resonance and would therefore lead to a high-performance probe for scanning near field optical microscopy. © 2002 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1487918
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  • 3
    Digitale Medien
    Digitale Medien
    Energy analysis of neutral atoms in broad oxygen ion beams by Doppler-shift measurements (1990)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 68 (1990), S. 5428-5434 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Optical emission spectroscopy has been established as a valuable method for the analysis of broad oxygen ion beams. The ion beams used for reactive ion-beam etching have been investigated in the energy range of 300–1500 eV. From survey spectra O+2 molecules and neutral O atoms are identified as main emitting species. Concerning the occurrence of emission lines the beam spectrum resembles that obtained from an O2 rf plasma. The intensity ratios however are strongly different within both spectra. Whereas electron impact is the main source for electronic excitation in ordinary etch plasmas, heavy particle collisions are suggested to play an important role in the investigated ion beams. Beam-induced emissions of atomic oxygen neutrals were recorded at high resolution of 0.1 A(ring). The O emission lines were found to be triple peaked. One peak at the unshifted wavelength and two Doppler-shifted peaks could be resolved. The absolute values of the wavelength shifts are well correlated to the energies of the initial ions extracted from the ion source by a grid optics. Besides slow atoms, atoms moving with the full beam energy as defined by the ion extraction conditions and with only half the beam energy are detected. The observed Doppler structure is attributed to charge exchange and dissociative collisions taking place in the gas phase.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.346998
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  • 4
    Digitale Medien
    Digitale Medien
    Fragmentation processes in reactive molecular ion beam etching (1993)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 74 (1993), S. 7517-7520 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: In a reactive ion beam etching system, gas phase collision processes in the reaction chamber were identified from the energy distributions of positive ions originating from source plasmas with O2, SF6, and CF4 as feed gases. The ion energy distributions are determined by a quadrupole mass spectrometer for main beam energies below 500 eV at typical working pressures in the reaction chamber of 1–10×10−2 Pa. Besides near thermal ions a considerable amount of high energy fragmentation products were detected for a number of primary molecular ions. The relative intensities of these products compared to the parent ions suggest a non-negligible influence of gas phase dissociation processes on the etch or deposition characteristics of molecular ion beams and the resulting properties of surfaces treated under elevated working pressure conditions.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.354977
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  • 5
    Digitale Medien
    Digitale Medien
    Direct writing of gold nanostructures using a gold-cluster compound and a focused-ion beam (1993)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 74 (1993), S. 7588-7591 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Spin-coated solid films of the gold-cluster compound Dodeca-(triphenylphosphine), hexa(chloro)pentapentacontagold Au55(PPh3)12Cl6 are irradiated with a focused 20-keV Ga+ focused-ion beam. The writing speeds on the substrate were ranging from 50 up to 2000 μm/s. This treatment locally decreases the solubility of the metalorganic precursor layer in CH2Cl2. Removal of the nonirradiated part of the surface layer with this solvent, followed by thermal decomposition of the remaining metalorganic nanostructures, leads to conducting gold lines. The width (150–360 nm) and height (20–80 nm) of these metallic lines depend on the ion dose and the original film height of the gold compound. The possible interactions leading to the fixation are briefly discussed.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.354985
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  • 6
    Digitale Medien
    Digitale Medien
    Analysis of a CF4/O2 plasma using emission, laser-induced fluorescence, mass, and Langmuir spectroscopy (1990)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 67 (1990), S. 3635-3640 
    Details
    ISSN: 1089-7550
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: The behavior of CF2 radicals in CF4/O2 plasmas has been studied as a function of the oxygen partial pressure in an rf reactor with 13.56 MHz, 30 W, and 40 mTorr total pressure. The CF2 ground and excited states were detected by the CF2 (A-X) band spectra applying laser-induced fluorescence and optical emission spectroscopy, respectively. Adding oxygen to the CF4 feed gas, the intensity of the CF2 signals in both spectra showed similar decrease. No evidence is found for a simple correlation between the neutral CF2 densities and the CF+2 ions measured by quadrupole mass spectrometry. Electron densities and temperatures were evaluated to be slightly above 8×109 cm−3 and ∼5 eV, respectively. A simplified model, which takes into account different excitation paths, suggests that direct electron impact of the CF2 ground state species was the dominant mechanism for the population of the electronically excited state. Absolute CF2 and O concentrations depending on the oxygen feed could be estimated. We obtained CF2 densities between 2×1013 and 2×1012 cm−3, when the oxygen concentration increases from 2% to 23%. The corresponding O densities varied from 1012 to 6×1013 cm−3.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.345317
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  • 7
    Digitale Medien
    Digitale Medien
    High intensity electron channeling and perspectives for a bright tunable x-ray source (1990)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 57 (1990), S. 2956-2958 
    Details
    ISSN: 1077-3118
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Using the continuous wave electron beam of the new Darmstadt superconducting electron accelerator and high intensity axial channeling in a diamond crystal, the possibility for the production of an intense tunable photon source in the x-ray region is investigated. Due to low emittance of the machine and its high current it has become possible, for the first time, to produce channeling radiation in the energy region of a few keV with an intensity of up to 2×1010 photons/s in an x-ray energy window of 10%. This is six orders of magnitude more than what has been observed previously.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.103738
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  • 8
    Digitale Medien
    Digitale Medien
    Improved tip performance for scanning near-field optical microscopy by the attachment of a single gold nanoparticle (2000)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 76 (2000), S. 2134-2136 
    Details
    ISSN: 1077-3118
    Quelle: AIP Digital Archive
    Thema: Physik
    Notizen: Nanometer-size optical probes are gaining increasing interest in near-field optical microscopy. Optimization of the probe shape is still a challenging research and development issue. Here, we propose to improve the optical properties of a fiber-based probe by attachment at the tip apex of one single gold particle of 60 nm diameter. This probe produces an enhancement of the light throughput, both in the near and the far fields, a homogenization of the diffracted light polarization, and a higher accuracy of the topographic sensitivity. In this letter, the chemical procedure for the fixation of one single gold particle on the apex of a standard tip for scanning near-field microscopy is described. Far-field as well as near-field measurements with this probe are performed, showing improvement of the light distribution in excellent agreement with the theory. © 2000 American Institute of Physics.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.126277
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  • 9
    Digitale Medien
    Digitale Medien
    Ion beam diagnostics by Doppler shifted light emissions (abstract)a) : Proceedings of the fourth International Conference on Ion Sources (1992)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 63 (1992), S. 2393-2393 
    Details
    ISSN: 1089-7623
    Quelle: AIP Digital Archive
    Thema: Physik , Elektrotechnik, Elektronik, Nachrichtentechnik
    Notizen: Broad low-energy ion beams in the energy range of 0.2 to 1.5 keV originating from a filament source with argon as feed gas have been analyzed by high-resolution emission spectroscopy. The Doppler structure of Ar+ emissions reveals the existence of different velocity classes. Besides slow ions and ions possessing the main beam energy, electronically excited Ar+ ions with twice the main beam energy are detected which are attributed to a single-electron capture process in Ar++/Ar collisions. As a preliminary result from a reactive beam extracted from a microwave CF4 source, plasma fast F atoms are detected which are attributed to charge exchange and dissociative collisions in the process chamber.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1142939
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  • 10
    Digitale Medien
    Digitale Medien
    Analysis of large-area beam attacks on surfaces and testing of etching reactions (1992)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 63 (1992), S. 48-55 
    Details
    ISSN: 1089-7623
    Quelle: AIP Digital Archive
    Thema: Physik , Elektrotechnik, Elektronik, Nachrichtentechnik
    Notizen: An apparatus has been constructed to analyze the particle flux of positive ions on surfaces from dry etching reactors. The particle flux can emerge from a great variety of reactive ion etching systems or from reactive ion beam etching sources. The particle beam passes through a small orifice with a diameter of 100 μm. A differentially pumped quadrupole mass spectrometer with a specially designed ion transfer optics performs the energy analysis of positive ions. The energy range can be varied between 0 and 500 eV with a resolution of 1%. The angular distribution measurements of the particle flux are carried out varying the inclination of the mass analyzer by ±20° with the vertex lying centrally in the sampling orifice. The angular resolution is about 1°. Rotation of the source on top of the apparatus and translation over ±10 cm in xy direction and 15 cm in z direction perpendicular to it is provided in order to assure fully local resolution. The electrical properties of the orifice-ion optics system is discussed with respect to their influence on ion trajectories. The purpose of the apparatus is to provide data on particle fluxes relevant for microelectronic processing.
    Materialart: Digitale Medien
    URL: http://dx.doi.org/10.1063/1.1142741
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