ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Nano-imprint lithography (NIL) is one of the most promising technologies for the massproduction of nano-meter patterns. A commercial hydraulic press and a pair of hot plates were used as the NIL system reported so far. It is, however, large and heavy. In this paper, therefore, a new moving-coil actuator is proposed and is intended to be used as the driving power for a compact NIL system. Compared to the commercial hydraulic NIL system, two advantages of the new NIL systemusing the moving-coil actuator are the ease of precise control as well as the compact dimensions. Thus, it is suitable for the fabrication and replication of small-sized nano-meter patterns. To develop such a new moving-coil actuator, the electromagnetic finite element method (FEM) is utilized. In addition, a simple but effective state-space model is also established to describe the dynamic behavior of the moving-coil actuator. Finally, a series of simulations and experiments arecarried out and the results show that the positioning accuracy of the developed moving-coil actuator is 1µm
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/12/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.505-507.1027.pdf
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