ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
The crystal orientation, surface morphology, surface roughness and scratch properties ofAu/NiCr/Ta multi-layered metallic films was examined by X-ray diffraction (XRD), atomic forcemicroscopy (AFM) and a scratch test method, respectively. It was clarified that the surfacemorphology and surface roughness depend on the substrate temperature. The surface roughnessdecreases from 4.259nm to 2.935nm when substrate temperature changed from 100°C to 180°C,and then increases when substrate temperature above 180°C. The XRD revealed that there are onlyAu diffraction peaks with highly textured having a Au-(111) or a mixture of Au-(111) and Au-(200)orientation. The micro-scratch test reveals that both modes can be used for conventionally criticalload determination, but the friction mode can additionally reflect the changes at different metallicfilm layers, the critical characteristic load was not sensitive to substrate temperature
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/55/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.353-358.1863.pdf
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