ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The well-known abnormal outdiffusion problem of heavily Be-doped GaAs prepared by molecular-beam epitaxy was found to be initiated by the shrinkage of the lattice constant of the (p+) GaAs epilayer. Through detailed investigation of the double-crystal x-ray spectra, van der Pauw measurements, photoluminescence, and infrared-absorption spectra of Be-doped GaAs for various doping concentrations, it is found that there exists a critical doping concentration, i.e., 2.6×1019/cm3, beyond which the lattice constant of the epilayer starts to shrink and the Be outdiffusion into the substrate is significantly enhanced. Apparently, the tensile stress on the epilayer results in the abnormal Be outdiffusion. The absorption coefficient of Be-doped GaAs in the 8–10 μm region with carrier concentration 8.3×1019/cm3 are found to be about 104 cm−1 which is useful for the application of this layer to a p+-type AlGaAs/GaAs heterojunction infrared detector.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.351527
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