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  • 1
    Electronic Resource
    Electronic Resource
    Effect of water absorption of dielectric underlayers on crystal orientation in Al–Si–Cu/Ti/TiN/Ti metallization (1997)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 81 (1997), S. 7030-7038 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The influence of the exposure of underlying dielectric (phophosilicate glass and borophosphosilicate glass) films to a humid air ambient on crystallographic orientations in Al–Si–Cu/Ti/TiN/Ti layered structures has been investigated as a function of the boron content and exposure time of the dielectric films. The Al(111) orientation in the layered structures was found to improve drastically with increasing boron content and exposure time of the dielectric films. The full width at half maximum value of an Al(111) x-ray rocking curve reached less than 1°. It was also found that the Al–Si–Cu surface becomes smoother and the average grain size increases as the Al(111) orientation improves. The improved Al(111) orientation was attributed to the improved Ti(002) orientation of the bottom Ti films. The mechanism of the improved Ti(002) orientation was investigated. It was confirmed that the improved orientation is closely related with the surface concentration of the absorbed water in the dielectric films. Further, it was demonstrated that interconnects fabricated from the improved layered structure have excellent electromigration performance. © 1997 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.365269
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  • 2
    Electronic Resource
    Electronic Resource
    Organic/inorganic superlattices with ordered organic layers (1995)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 77 (1995), S. 1985-1989 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Superlattices consisting of alternating layers of organic and inorganic materials have been fabricated from 3,4,9,10-perylenetetracarboxylic diimide (PTCDI), copper phthalocyanine (CuPc), and MgF2 by molecular-beam deposition. From the small-angle x-ray diffraction patterns of PTCDI/MgF2 and CuPc/MgF2 superlattices, a periodically layered structure is confirmed through the entire stack. The PTCDI layers in the PTCDI/MgF2 superlattices have a high degree of structural ordering, in which molecular planes are nearly parallel to the substrate surface. On the other hand, the CuPc/MgF2 superlattices have a poorly ordered structure in the CuPc layers. It is found that the optical absorption spectra of these superlattices are different from those of organic single films and significantly change with varying organic layer thickness. Such spectral changes can be interpreted by the effect of the aggregate size and the coexistence of two different crystal forms. © 1995 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.358834
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  • 3
    Electronic Resource
    Electronic Resource
    Effects of additive elements on electrical properties of tantalum oxide films (1994)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 75 (1994), S. 2538-2544 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Ta2O5-based composite films prepared by magnetron sputtering have been investigated with respect to their dielectric properties. As additive third oxides, Y2O3 and WO3 were found to be effective materials for improving insulating properties. In these composite films, the dielectric constant remained unchanged. The maximum storage charge of the composite films was twice that of Ta2O5 films. The main reason for improving the insulating properties could be explained by the charge compensation of excess oxygen by these additive oxides.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.356227
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  • 4
    Electronic Resource
    Electronic Resource
    Erratum: "Numerical study of the effective surface area of obliquely deposited thin films" [J. Appl. Phys. 90, 5599 (2001)] (2002)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 91 (2002), S. 2556-2556 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: © 2002 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1436098
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  • 5
    Electronic Resource
    Electronic Resource
    Numerical study of the effective surface area of obliquely deposited thin films (2001)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 90 (2001), S. 5599-5605 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We have developed a three-dimensional Monte Carlo simulator for thin film growth and applied it to understand the morphologies of thin films prepared by dynamic oblique deposition with a special emphasis on an effective surface area. Columnar shapes zigzag, helix, and cylinder are successfully reproduced, and the packing density of simulated thin films agrees quantitatively with that obtained experimentally. The effective surface area is enhanced by oblique deposition owing to columnar formation and becomes maximum at a deposition angle of 70 °. On the contrary, no significant dependence of the effective surface area on the columnar shapes has been observed. Consequently, morphology-related quantities of obliquely deposited thin films such as the packing density and the effective surface area are understood in terms of the deposition angle and are insensitive to the motion of the azimuthal deposition direction. © 2001 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1415534
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  • 6
    Electronic Resource
    Electronic Resource
    Anisotropy in the optical absorption of Ag–SiO2 thin films with oblique columnar structures (1992)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 71 (1992), S. 2848-2854 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: An attempt has been made to clarify the anisotropy in the optical absorption and nanostructure of thin films prepared by oblique codeposition of Ag and SiO2. At a low concentration of Ag, the columnar structure grows toward the incident direction of vapor flux of SiO2, and Ag is dispersed in that structure as small metallic particles. An inhomogeneous distribution of Ag particles is obtained when Ag is deposited from the side of the normal to the film surface opposite to that of the incident direction of SiO2 flux. The optical transmittance is strongly dependent on the angle of incidence and the polarization of the incident light due to the effects of the small Ag particles embedded in the oblique columnar structure. The anisotropic optical absorption of Ag and SiO2 hybrid films can be used as an inorganic polarizer.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.351368
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  • 7
    Electronic Resource
    Electronic Resource
    Ejection angle dependence of electrical properties of ion beam sputtered tantalum oxide films (1991)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 58 (1991), S. 577-579 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Ion beam sputtering was used to deposit tantalum oxide films on silicon substrates at different positions surrounding a Ta2O5 target. dc conductance of the films shows dependence on the ejection angle of sputtered particles and primary ion energy. Capacitance-voltage characteristics also vary by changing the primary ion energy. These variations of electrical properties are discussed by considering the effect of anisotropic ejection of the sputtered energetic particles.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.104592
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  • 8
    Electronic Resource
    Electronic Resource
    Structures and properties of chromium thin films prepared by anisotropic-emission-effect sputter deposition (1990)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 67 (1990), S. 1030-1036 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Chromium thin films were prepared by a sputter-deposition system in which substrates were arranged semicircularly against a chromium target. Structures and compositions of the films were investigated by x-ray diffractometer, x-ray photoelectron spectroscopy, electron probe microanalyzer, and scanning electron microscope. It was found that oxygen content in the films was highest at the opposite side of the target and was lowest at the position of 60° or 75° off with respect to the target normal. At the latter position, (110)-preferred orientation and enlargement of the bcc chromium lattice were observed. Although cracks were generated in the films deposited at the opposite side of the target, no cracks were generated in the films deposited at the oblique direction. These results on the chromium films could be explained in terms of the bombardment effect by the reflected argon atoms whose energy was a function of the scattering angle.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.345786
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  • 9
    Electronic Resource
    Electronic Resource
    Giant magnetoresistance in Co/Cu superlattices with mixed interfaces (1993)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 74 (1993), S. 4660-4663 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Magnetoresistance, antiferromagnetic coupling, and crystallographic orientation of Co/Cu superlattices with intentionally mixed interfaces have been studied as a function of the thickness of the mixed region. The antiferromagnetic coupling is weakened, and spin-independent scattering of free electrons is enhanced with increasing thickness of the mixed region, although the morphology and the superlattice period remain unchanged. Saturation magnetoresistance is reduced from 27% to 4% as the result of the formation of a 0.15 nm mixed region at the interfaces. Moreover, the crystallographic orientation of Co/Cu superlattices is also found to be varied by formation of the mixed region. Giant magnetoresistance, antiferromagnetic coupling, and the crystallinity of Co/Cu superlattices are governed by the events in the thin region at the interfaces less than 1 monolayer.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.354356
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  • 10
    Electronic Resource
    Electronic Resource
    Changes in composition and deposition rates in the reactive sputtering of copper, titanium, and yttrium exposed to oxygen (1989)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 54 (1989), S. 1664-1665 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Copper, titanium, and yttrium oxide films were prepared by reactive dc magnetron sputtering in an Ar-O2 plasma and the deposition rates and compositional changes were measured as a function of dc power. The deposition rates of Cu increased monotonically with increasing dc power, while those of Ti and Y increased abruptly by more than one order of magnitude at a critical dc power (Pc). Abrupt compositional changes of metal and oxygen in the thin films were also observed for Ti and Y at Pc. The compositional change curve for Cu had a plateau in dc power dependence. These results correlate with the differences of heat of oxide formation among Cu, Ti, and Y.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.101299
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