Publication Date:
2018-07-18
Description:
The influence of the oxygen flow rate on the friction coefficient of titanium oxynitride films deposited by reactive magnetron sputtering at a constant current of a hot target was investigated. The study used the plans of the active experiment and regression models of the first and second order. It is found that the increase of the oxygen flow rate in the gas environment leads to the increase of the film friction coefficient.
Print ISSN:
1757-8981
Electronic ISSN:
1757-899X
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
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