Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
76 (2000), S. 288-290
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
An atmospheric pressure plasma source operated by radio frequency power has been developed. This source produces a unique discharge that is volumetric and homogeneous at atmospheric pressure with a gas temperature below 300 °C. It also produces a large quantity of oxygen atoms, ∼5×1015 cm−3, which has important value for materials applications. A theoretical model shows electron densities of 0.2–2×1011 cm−3 and characteristic electron energies of 2–4 eV for helium discharges at a power level of 3–30 W cm−3. © 2000 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.125724
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