ISSN:
0894-3370
Keywords:
Engineering
;
Electrical and Electronics Engineering
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Electrical Engineering, Measurement and Control Technology
Notes:
This paper describes the application of the boundary element method to solving two-dimensional steady slow viscous flow problems (creeping flow) in thermal silicon oxidation. The proposed method used the velocity-pressure formulation. The use of the incompressibility condition as a boundary condition and the application of the second Green's identity to transform the domain integral into a boundary integral result in a system of three boundary integral equations for velocity components and pressure. Solution of this system to be an ill-posed problem because of the presence of boundary conditions of the first kind. Two methods of regularization are employed. The numerical results for trench oxidation process are presented.
Additional Material:
3 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/jnm.1660070103
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