ALBERT

All Library Books, journals and Electronic Records Telegrafenberg

feed icon rss

Your email was sent successfully. Check your inbox.

An error occurred while sending the email. Please try again.

Proceed reservation?

Export
  • 1
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 73 (1993), S. 1634-1643 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The results of a Monte Carlo model for calculating the trajectories of electrons in the plasma sheath region in reactive-ion-etching plasmas are described. The calculations illustrate how the oscillating movement of the sheath imparts energy to electrons and alters the electron energy distribution (EED) within the bulk of a 13.56 MHz Ar discharge. The study is limited to low-pressure discharges of less than about 10 mTorr, where the effects of electron-molecule collisions can be ignored. Under these conditions it is found that the sheath imparts energy preferentially to low-energy electrons. Calculated EEDs for electrons striking the electrodes in a radio-frequency reactor are also presented. Most electrons strike the electrodes with energies of a few eV, but some electrons strike the substrate surface with impact energies as high as 20 eV. This may be an important consideration when modeling etch mechanisms. Secondary electron emission caused by ion bombardment of the electrodes is also modeled. Simulated EEDs for secondary electrons that are produced at the electrodes and accelerated by the action of the sheath potential into the plasma region are presented. These electrons have energies of up to several hundred eV and are therefore important in plasma-sustaining mechanisms.
    Type of Medium: Electronic Resource
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
  • 2
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 71 (1992), S. 3721-3730 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Using a recently published description of the potentials in a radio-frequency discharge [Y. P. Song, D. Field, and D. F. Klemperer, J. Phys. D 23, 673 (1990)] Monte Carlo trajectories of ions and neutral particles for an Ar plasma have been computed, including collisions at the realistic pressures of tens of mTorr used for reactive ion etching. The model for collisions involves both charge exchange and momentum-transfer scattering. Ion and neutral energy and angular distributions have been calculated for particles impacting on the powered electrode and the calculations agree with an experimental ion energy distribution for Ar+. The presence of a large proportion of energetic neutrals is predicted, and it is suggested that these may have an important role to play in etch mechanisms.
    Type of Medium: Electronic Resource
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
  • 3
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 70 (1991), S. 82-92 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Using a theoretical description of potentials in radio-frequency (rf) discharges reported elsewhere [Song, Field, and Klemperer, J. Phys. D: Appl. Phys. 23, 673 (1990)] we derive the equations of motion for ions from the plasma region striking the cathode and anode in the absence of collisions in the sheath. We compute ion energy distributions (IEDs) which we find to be in excellent agreement with recent experimental data for Ar, Ar/H2 mixtures, O2, and CF4 parent gases. We also present a method of estimating IEDs which does not involve extensive computation, a development of particular value in the design of reactive ion etching processes.
    Type of Medium: Electronic Resource
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
  • 4
    Electronic Resource
    Electronic Resource
    College Park, Md. : American Institute of Physics (AIP)
    The Journal of Chemical Physics 95 (1991), S. 6343-6354 
    ISSN: 1089-7690
    Source: AIP Digital Archive
    Topics: Physics , Chemistry and Pharmacology
    Notes: The 7 K luminescence spectra of Ni2+ lightly doped into MgCl2, CsMgCl3, CdCl2, and CsCdCl3, produced by excitation into the 3A2g→3T1g(3P) absorption band of Ni2+, are reported. Luminescence in these compounds originates from two metastable states of Ni2+ : the first excited state, 3T2g; and a higher excited state, 1T2g. Emission from 1T2g, corresponding to transitions to all lower-lying levels, is observed. Rates corresponding to the various radiative and nonradiative transitions from 3T2g and 1T2g at 5 K are given. At low temperature, relaxation from 3T2g is largely radiative in nature, whereas multiphonon emission makes a significant contribution to 1T2g relaxation down to the lowest temperature studied (5 K). In Ni2+@B:CsCdCl3, there appears to be a significant nonradiative pathway out of 1T2g directly to the ground state, bypassing all intermediate excited states. The temperature dependence of multiphonon emission from 1T2g is modeled using the single configurational coordinate (SCC) approximation, assuming harmonic potentials with equal force constants. As the Ni2+ concentration is increased in these lattices, 1T2g luminescence is deactivated due to Ni2+–Ni2+ cross relaxation. The mechanism of cross relaxation in Ni2+@B:CsCdCl3 is investigated by analyzing the decay curves of 1T2g luminescence according to the theories of Dexter and Inokuti and Hiroyama. Cross relaxation in Ni2+@B:CsCdCl3 is best described by a dipole–dipole mechanism. The cross relaxation process is shown to increase the quantum efficiency of 3T2g luminescence in Ni2+@B:CsCdCl3 and Ni2+@B:CsMgCl3 at 5 K.
    Type of Medium: Electronic Resource
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
  • 5
    Electronic Resource
    Electronic Resource
    Oxford, UK : Blackwell Publishing Ltd
    Grass and forage science 26 (1971), S. 0 
    ISSN: 1365-2494
    Source: Blackwell Publishing Journal Backfiles 1879-2005
    Topics: Agriculture, Forestry, Horticulture, Fishery, Domestic Science, Nutrition
    Notes: A mechanical device to record time spent in grazing by sheep is described and the results of tests of its performance under field conditions are given. There was good agreement between mecbanicai and visual records under field conditions, and observations made during tbe tests indicate a possible source of bias where visual records are made by an observer watching a group of animals.
    Type of Medium: Electronic Resource
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
  • 6
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 79 (1996), S. 7264-7273 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We have constructed a molecular beam mass spectrometer designed specifically to sample gases from a diamond chemical vapor deposition (CVD) process chamber thereby enabling characterization of the gas-phase CVD environment. With this in situ diagnostic technique we have obtained quantitative measurements of the composition of the gas-phase species as a function of filament temperature for a variety of C/H/Cl gas mixtures. The precursor mixtures used were 1% of a chloromethane (CH4−nCln, n=1-4) in hydrogen and 1% CH4 in hydrogen with added Cl2 varying from 1% to 4%. At filament temperatures optimum for diamond growth (∼2300°C) the relative CH4/C2H2/C2H4 product distribution measured in the gas mixture is remarkably similar to that established when CH4 is the carbon precursor species. At these filament temperatures almost all the chlorine is reduced to HCl, its concentration being proportional to the Cl fraction in the source gas, regardless of the form of the chlorine in the source gas mixture. Compositional analysis of the as-grown diamond films indicated that no chlorine was present in the bulk of the films, though trace amounts of chlorine were detected on the film surface. From these observations we surmise that chlorine atoms are involved in the gas-surface reactions which produce active growth sites on the diamond surface. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
  • 7
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 79 (1996), S. 3793-3795 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The effect of applying an electric field across a quasi-phase-matched frequency doubling lithium tantalate waveguide has been investigated. The waveguide was fabricated by a two-stage ion exchange process in pyrophosphoric acid. An electric field of 2 kV/mm was found to shift the phase matching wavelength by 0.05 nm. It is estimated that more optimized waveguides could produce wavelength shifts of ±4 nm for an applied electric field of ±20 kV/mm and could compensate for temperature variations of ±67 °C. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
  • 8
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 57 (1990), S. 1584-1585 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Lanthanum hexaboride (LaB6) is investigated for its potential as a low work-function photocathode for high brightness e-beam applications. Thin films of LaB6 at room temperature are shown to have quantum efficiencies of 0.2×10−3 at 442 nm excitation but readily form an inhibiting oxide. This oxide is easily removed by in situ 500 eV Ar+ ion sputtering, which restores photoemission for over 30 min at an oxygen partial pressure of 10−9 Torr.
    Type of Medium: Electronic Resource
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
  • 9
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 51 (1987), S. 145-147 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A scanning electron microscope which uses an ultrashort pulsed laser/photocathode combination as an electron source produces electron pulses of order 1 ps in duration at a 100-MHz repetition rate and with a peak brightness of 3×108 A/cm2 steradian at 1.8 keV. By using this instrument in the voltage contrast mode, without contact with the samples, we have been able to measure electrical pulses propagating on coplanar transmission lines with, simultaneously, a temporal resolution of 5 ps, a voltage resolution of 3 mV/(Hz)1/2, and a spatial resolution of 0.1 μm. These measurements are achieved with extraction fields above the sample of about 1 kV/mm.
    Type of Medium: Electronic Resource
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
  • 10
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 57 (1990), S. 1078-1080 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We demonstrate modulation for GaAs multiple quantum well (MQW) waveguide modulators on silicon substrates. The modulators, which were fabricated by molecular beam epitaxy, were operated at wavelengths of 890–910 nm, with greater than 20 dB modulation obtained at λ=900 nm for a reverse bias of 2.5 V. Photocurrent measurements were performed on GaAs MQWs grown on Si and compared with results obtained for GaAs MQWs grown on GaAs. The structures were integrated with GaAs/AlGaAs waveguides and are suitable for integration with silicon-based electronics.
    Type of Medium: Electronic Resource
    Location Call Number Expected Availability
    BibTip Others were also interested in ...
Close ⊗
This website uses cookies and the analysis tool Matomo. More information can be found here...