ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Electron behavior in an electron cyclotron resonance microwave discharge sustained by TM11 mode fields of a cylindrical waveguide has been investigated via a Monte Carlo simulation. The time averaged, spatially dependent electron energy distribution is computed self-consistently. At low pressures (∼0.5 mTorr), the temperature of the tail portion of the electron energy distribution exceeds 40 eV, and the sheath potential is about −250 V. These results, which are about twice as high as the previous results for TM01 mode fields [S. C. Kuo, E. E. Kunhardt, and S. P. Kuo, J. Appl. Phys. 73, 4197 (1993)], suggest that TM11 mode fields have a stronger electron cyclotron resonance effect than TM01 mode fields in a cylindrical waveguide. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.363033
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