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  • 1
    Electronic Resource
    Electronic Resource
    On the radial distribution and nonambipolarity of charged particle fluxes in a nonmagnetized planar inductively coupled plasma (1996)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 80 (1996), S. 6639-6645 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The radial distribution of electron and ion fluxes to conducting and nonconducting walls in a planar inductively coupled plasma has been studied experimentally and theoretically. Measurements of electron and ion currents have been performed using electrostatic probe arrays. Radially resolved measurements of ion impact energies have been performed using an ion energy analyzer array. For conducting walls it is shown by calculations and measurements that electron and ion currents are not in balance locally but that diffusion is nonambipolar. The ion impact energies measured on a conducting surface show a significant radial variation in accord with our theoretical model. For nonconducting surfaces the ambipolar fluxes of electrons and ions result in the formation of a surface charge potential profile across the surface. Voltages of the order of several volts between the center and the periphery of the surface are measured. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.363786
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  • 2
    Electronic Resource
    Electronic Resource
    Spatial variation of the electron distribution function in a rf inductively coupled plasma: Experimental and theoretical study (1994)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 76 (1994), S. 2048-2058 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The spatial dependence of the electron distribution function (EDF) and of related macroscopic parameters in an inductively coupled argon plasma at 13.56 MHz is studied. The rf induction field is generated using a planar coil. The EDF is determined experimentally with axial and radial resolution via a Langmuir probe technique. The experimental results demonstrate that the EDF can be considered as a spatially homogeneous function of the total energy of electrons. The axial variation of the EDF is described by a one-dimensional, kinetic model, which is based on the nonlocal approach to the solution of the spatially inhomogeneous Boltzmann equation. Good agreement between measured and calculated electron distribution functions is found. Also the axial profiles of the space-charge potential, the electron density, and the mean kinetic energy of the electrons are well reproduced by the theoretical model.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.357674
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  • 3
    Electronic Resource
    Electronic Resource
    A radiometric investigation of low-pressure rf sulfur discharges (1996)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 79 (1996), S. 7523-7528 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: This investigation focuses on low-pressure S2 molecular rf discharges for use as diffuse radiators. Cylindrical fused silica S2–Ar and S2–Ne lamps have been tested at 13.56 MHz and the absolute radiative efficiencies have been measured. The radiation is emitted primarily between 2800 and 3500 A(ring). The UV radiative efficiencies were studied as a function of input power, buffer gas pressure, discharge radius, and applied external cooling. The maximum observed efficiency for a low power density, diffuse rf discharge is 7%. The measured UV efficiencies of the 13.56 MHz discharges are somewhat lower than those of low-pressure S2–Ar dc discharges. A reentrant lamp design has been tested as well and no improvements in efficiency were observed. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.362424
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  • 4
    Electronic Resource
    Electronic Resource
    Investigations of the 147 nm radiative efficiency of Xe surface wave discharges (1997)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 81 (1997), S. 1087-1092 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The radiative efficiency of the 147 nm resonance radiation of Xe excited in a low pressure, high-frequency surface wave sustained plasma has been investigated. The radiative UV power has been obtained from optical absorption spectroscopic measurements of the Xe resonance level population and from Monte Carlo calculations of the effective decay rate of this level. Precise measurements of the rf power absorbed by the plasma enable the determination of the absolute vacuum ultraviolet discharge efficiency for the Xe surface wave discharge. Results show efficiencies up to more than 80(±11)% . © 1997 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.363851
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  • 5
    Electronic Resource
    Electronic Resource
    On the use of dust plasma acoustic waves for the diagnostic of nanometer-sized contaminant particles in plasmas (1997)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 71 (1997), S. 208-210 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: During the phase of dust nucleation in plasma enhanced chemical vapor deposition systems, nanometer-sized dust particles appear in large concentrations. The dispersion characteristics of dust acoustic waves in such a plasma during the nucleation phase is analyzed. It is shown that the dispersion properties of the dust acoustic wave depend sensitively on the particle size. It is proposed to use dust acoustic waves as a novel particle size diagnostic for nanometer-sized particles. © 1997 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.119502
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  • 6
    Electronic Resource
    Electronic Resource
    Fast two-dimensional self-consistent kinetic modeling of low-pressure inductively coupled RF discharges (1994)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 65 (1994), S. 1355-1357 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: In this letter a two-dimensional self-consistent model for an inductively coupled RF plasma is presented. The model is based on the spatially resolved determination of the electron distribution function (EDF) via solution of a kinetic equation in the nonlocal approach. The static space charge potential is computed from a 2D fluid model, the RF electric field profile is calculated from the wave equation. The model can easily be treated on usual personal computers with computation times of about one hour. The theoretical results are compared to measurements presented in a previous publication [U. Kortshagen, I. Pukropski, and M. Zethoff, J. Appl. Phys. 76, 2048 (1994)].
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.112050
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  • 7
    Electronic Resource
    Electronic Resource
    On the efficiency of the electron sheath heating in capacitively coupled radio frequency discharges in the weakly collisional regime (1995)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 67 (1995), S. 191-193 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: In low pressure, capacitively coupled rf discharges mode transitions in the shape of the electron energy distribution function on variation of the pressure have been observed previously, and have been interpreted as a transition from dominating stochastic to dominating Joule heating. In this letter we present a similar mode transition, which has been observed at constant discharge pressure on variation of the rf current density through the discharge. By comparison to a parametric kinetic model it is shown that a dependence of the sheath heating efficiency on the magnitude of the rf sheath potentials can be considered as a possible explanation of the mode transition. © 1995 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.114663
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  • 8
    Electronic Resource
    Electronic Resource
    Radial structure of a low-frequency atmospheric-pressure glow discharge in helium (2002)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 80 (2002), S. 1722-1724 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The spatial structure of a low-frequency atmospheric-pressure glow discharge was studied experimentally. The radial current distribution and discharge light emission were simultaneously measured at different phases during the ac voltage cycle. The glow discharge is formed by a radially propagating ionization wave. We also observed discharge regimes with several current pulses per half cycle corresponding to the successive, spatially separated breakdowns. © 2002 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1458684
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  • 9
    Electronic Resource
    Electronic Resource
    Experimental observation of a "convective cell" in electron phase space in an inductively coupled radio-frequency plasma (2000)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 77 (2000), S. 1265-1267 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Spatially resolved two-dimensional Langmuir-probe measurements of energy-resolved electron fluxes have been performed in an inductively coupled radio-frequency plasma. A flux pattern reminiscent of a "convection cell" in energy-configuration space has been observed. The measurements are interpreted in terms of a total-energy picture of the plasma electrons. © 2000 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1289905
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  • 10
    Electronic Resource
    Electronic Resource
    Experimental and numerical study of electromagnetic effects on resonance cones (1989)
    New York, NY : American Institute of Physics (AIP)
    Physics of Fluids 1 (1989), S. 538-544 
    Details
    ISSN: 1089-7666
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The resonance cone (rc) diagnostic is usually based on kinetic theory within the electrostatic approximation. Numerical and experimental results are presented, which reveal the influence of the neglected electromagnetic terms in the dispersion relation. In the near field a shift of the rc toward smaller angles occurs, which may be important at high electron densities and temperatures. In the far field the phase variation inside the cone turns out to be useful as a new electron density diagnostic in the regime of high densities, where the rc diagnostic was previously not applicable.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.859169
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