ISSN:
1572-8986
Keywords:
Actionometry
;
spectroscopy
;
etching
;
SF6-O2 discharge
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Technology
Notes:
Abstract A comparison of the results obtained by solving the Boltzmann equation with the experimental results from optical emissions obtained in SF6-O2 radiofrequency discharges, when N2, Ar, and He are also admitted as actinometers, has allowed us to explore the potentialities and limits of actinometry. The use of different actinometers also allowed us to monitor the evolution of the electron distribution functions as a function of the plasma parameters.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00615123
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