ISSN:
1573-8906
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
Notes:
Abstract An analysis is given of the problem of making sensors for quantities in physics and physical chemistry based on the achievements of microelectronics. The modem technical design basis of microelectronic sensors is considered together with the direction of its further development. Data and results are given concerning the development of microelectronic force, pressure, magnetic field, and hydrogen-leakage sensors.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00993602
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