ISSN:
1432-1858
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
,
Technology
Notes:
Abstract We demonstrate an electrostatic micro actuator which is fabricated by LIGA process. The actuator is designed for a magnetic head tracking system of hard disk drives (HDDs). The actuator is essential to achieve very high track density of HDDs. We realize the aspect ratio of 125 by the LIGA process using a Si-Au mask. We propose to use PMMA molds both as the mechanical structure and as the insulator between electrodes. We believe there are great opportunity for the LIGA process in making micro actuators of HDDs.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s005420050144
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