ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
We have studied the chemical vapor deposition of copper from 1,5-cyclooctadiene Cu(I) hexafluoroacetylacetonate, a moderately volatile yellow cystalline solid. It yields pure copper by pyrolytic decomposition at 150–250 °C, produces copper films with near bulk resistivity, and has the advantage of being air stable at room temperature.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.106060
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