ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
A novel profilometer for three-dimensional (3D) surface topography measurement ispresented. The profilometer has large measuring range, high precision and small measuring touchforce. It is composed of a two-dimensional (2D) displacement sensor, a 3D platform based onvertical scanning, measuring and control circuits and an industrial control computer. When aworkpiece is measured, the vertical undulation of the profile at a sampling point leads to a zerooffset of the 2D displacement sensor. According to the zero offset, a piezoelectric actuator and aservo motor drive the vertical scanning platform to move vertically to ensure that the lever returnsto its balance position. So the non-linear error caused by the rotation of the lever is very small evenif the measuring range is large. When the stylus barges up against a steep wall, the horizontalresistance force results in another zero offset of the 2D displacement sensor. If the zero offsetexceeds a quota, the vertical scanning platform descends to make the stylus climb the steep wallsuccessfully. According to the theoretical and experimental analysis, the profilometer can measureroughness, profile of sphere, step, groove and other 3D surfaces with curvature precisely
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/56/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.364-366.750.pdf
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