Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
62 (1993), S. 1623-1625
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
A GaAs surface grating (period 574 nm) is analyzed by four crystal-six reflection x-ray diffraction. Two-dimensional measurements in the vicinity of the 004 GaAs reciprocal lattice point show satellites in the transverse direction related to the periodicity of the grating. A cross pattern, centered on the 004 GaAs reciprocal lattice point, is formed by these satellites. An explanation is given by a model which includes the influence of transmission through the surface pattern on the substrate diffraction.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.108606
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