ISSN:
1662-8985
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Arc ion plating(AIP) has higher deposition rates, whereas macro-particles (MPs) makethe film properties decreasing. In this paper, AIP with or without magnetic filter (MF or AIP) andcomposition of AIP followed with magnetic filter (MFAIP) were designed to deposit TiN films onsilicon (Si) and high-speed steel(HSS), respectively. Scanning electron microscope (SEM),nanoindentation and microscratch tests were investigated. SEM showed that both the MF and theMFAIP films had a superfine layer among the columnar crystals grown vertically against substratesurface. However, the columnar crystals of MF films were leptosomatic and well-orientational,while MFAIP ones were coarse and short, and even ragged in size and orientation. Nanoindentationtest results showed the highest hardness for MF films and the lowest one for AIP films. A newparameter Scratch Crack Propagation Resistance (CPRs) was introduced to evaluate the filmadhesion properties in a scratch test. MF films had the highest adhesion. AIP films were mostsusceptible to failure as the CPRs was the lowest, although the Lc1 was higher than MFAIP ones. Itwas proposed that the MPs were effectively removed with the MF, and the MF layers weresuperfine to improve the properties of the films
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/40/transtech_doi~10.4028%252Fwww.scientific.net%252FAMR.32.61.pdf
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