ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
A novel model of 3-DOF multilayer PZT micromanipulator is promoted and simulated withfinite element analysis method. States under different applied voltages were discussed, including themotion along axis Z and the rotation along axis X and the bisector between X-Y. After analyzing thedistribution of stress, we propose some method, which helps to improve the performance of themicromanipulator. We also do some quantificational analysis about the micromanipulator, discoveringthat the relationship between the displacements of the probe and applied voltages is almost perfectlylinear. By comparing the constant D defining the relationship of the displacements of probe tip andapplied voltages, the simulation is proved to be correct. Comparing the performance between thesingle-layer and multi-layer PZT, it shows that the multi-layer PZT can reduce input voltages, whereascan produce the same displacement. Ceramic sample is prepared for further experiment
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/56/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.368-372.218.pdf
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